Composition for film formation, film, production method of patterned substrate, and compound
A composition comprises a compound comprising a partial structure represented by formula (1) and comprising an intermolecular bond-forming group; and a solvent. X 1 and X 2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with a spiro carbon atom and carbon atoms of an aromatic ring. R 1 and R 2 each independently represent a halogen atom, a hydroxy group, a nitro group or a monovalent organic group. a1 and a2 are each independently an integer of 0 to 8. n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are each independently an integer of 0 to 8. A sum of k1 and k2 is no less than 1, and a sum of a1 and k1. A sum of a2 and k2 are no greater than 8.
1. A method for producing a patterned substrate, comprising:
applying a composition on an upper face side of a substrate to form a resist underlayer film;
forming a resist pattern directly or indirectly on the resist underlayer film; and
etching the substrate using the resist pattern as a mask such that the substrate has a pattern,
wherein the composition comprises:
a compound represented by formula (2); and
a solvent:
((Y 1 j1 Ar 3 —O Ar 1 —O p1 k1 Z 1 O—Ar 2 p2 O—Ar 4 Y 2 ) j2 ) k2 (2)
wherein, in the formula (2), Z 1 is a partial structure represented by formula (1); k1 and k2 are each independently an integer of 0 to 8, wherein a sum of k1 and k2 is no less than 1; Ar 1 and Ar 2 each independently represent a substituted or unsubstituted arenediyl group having 6 to 20 carbon atoms; p1 and p2 are each independently an integer of 0 to 3; Ar 3 represents a group obtained by removing (j1+1) hydrogen atoms from an aromatic ring of a substituted or unsubstituted arene having 6 to 20 carbon atoms; Ar 4 represents a group obtained by removing (j2+1) hydrogen atoms from an aromatic ring of a substituted or unsubstituted arene having 6 to 20 carbon atoms; j1 and j2 are each independently an integer of 1 to 9; Y 1 and Y 2 each independently represent a monovalent intermolecular bond-forming group having 1 to 20 carbon atoms, wherein in a case where Ar 1 to Ar 4 , Y 1 , Y 2 , p1, p2, j1 and j2 are present in a plurality of number, a plurality of Ar 1 s are identical or different, a plurality of Ar 2 s are identical or different, a plurality of Ar 3 s are identical or different, a plurality of Ar 4 s are identical or different, a plurality of Y 1 s are identical or different, a plurality of Y 2 s are identical or different, a plurality of p1s are identical or different, a plurality of p2s are identical or different, a plurality of j1s are identical or different, and a plurality of j2s are identical or different,
wherein, in the formula (1), X 1 and X 2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with a spiro carbon atom and carbon atoms of an aromatic ring; R 1 and R 2 each independently represent a halogen atom, a hydroxy group, a nitro group or a monovalent organic group; a1 and a2 are each independently an integer of 0 to 8, wherein in a case where R 1 and R 2 are each present in a plurality of number, a plurality of R 1 s are each identical or different, and a plurality of R 2 s are each identical or different; n1 and n2 are each independently an integer of 0 to 2; k1 and k2 are each as defined in the formula (2), and a sum of a1 and k1, and a sum of a2 and k2 are no greater than 8; and * denotes a binding site to a moiety other than the partial structure, and
wherein the monovalent intermolecular bond-forming group represented by Y 1 or Y 2 is a group comprising a carbon-carbon double bond-containing group, a group comprising a carbon-carbon triple bond-containing group, a hydroxy chain hydrocarbon group, an acyl group, a carbonyloxy hydrocarbon group or a combination thereof.
2. The method according to claim 1 , wherein a molecular weight of the compound is no less than 300 and no greater than 3,000.
3. The method according to claim 1 , wherein the solvent comprises a polyhydric alcohol partial ether acetate solvent, a ketone solvent, a carboxylic acid ester solvent or a combination thereof.
4. The method according to claim 1 , wherein the sum of k1 and k2 in the formula (1) is an integer of 2 or 4.
5. The method according to claim 1 , wherein in the formula (2), p1 and p2 are each independently an integer of 1 or 2.
6. The method according to claim 1 , wherein in the formula (2), p1 and p2 are each an integer of 1.
7. The method according to claim 6 , wherein in the formula (2), each of Ar 1 and Ar 2 is substituted with a cyano group.
8. The method according to claim 1 , wherein in the formula (2), at least one of Ar 1 , Ar 2 , Ar 3 , and Ar 4 is substituted with a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a hydroxy group, an amino group, a cyano group, a nitro group, an alkoxy group, an alkoxycarbonyl group, an alkoxycarbonyloxy group, an acyl group, an arylaminocarbonyl group, or an arylamino group.
9. The method according to claim 1 , wherein in the formula (2), at least one of Ar 1 , Ar 2 , Ar 3 , and Ar 4 is substituted with a cyano group.
10. The method according to claim 1 , wherein the monovalent intermolecular bond-forming group represented by Y 1 or Y 2 is a group comprising a carbon-carbon double bond-containing group, a group comprising a carbon-carbon triple bond-containing group.
11. The method according to claim 1 , wherein the monovalent intermolecular bond-forming group represented by Y 1 or Y 2 is a substituted or unsubstituted ethynyl group, a substituted or unsubstituted propargyl group, a (meth)acryloyl group, an allyl group, an allyloxy group, a phenylallyloxy group, a cyclohexenylmethoxy group, a styrylmethoxy group, a group represented by formula (3-1), a group represented by formula (3-2) or a group represented by formula (3-3):
wherein:
in the formula (3-1), R 3 and R 4 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and q is 1 or 2, wherein in a case where q is 2, a plurality of R 3 s are each identical or different with each other;
in the formula (3-2), R 5 , R 6 and R 7 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and
in the formula (3-3), R 4′ , R 5′ , R 6′ and R 7′ each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and q′ is 1 or 2, wherein in a case where q′ is 2, a plurality of R 5′ s, R 6′ s and R 7 s are each identical or different with each other.
12. The method according to claim 1 , wherein the monovalent intermolecular bond-forming group represented by Y 1 or Y 2 is a group represented by formula (3-1), a group represented by formula (3-2) or a group represented by formula (3-3):
wherein:
in the formula (3-1), R 3 and R 4 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and q is 1 or 2, wherein in a case where q is 2, a plurality of R 3 s are each identical or different with each other;
in the formula (3-2), R 5 , R 6 and R 7 each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and
in the formula (3-3), R 4′ , R 5′ , R 6′ and R 7′ each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms; and q′ is 1 or 2, wherein in a case where q′ is 2, a plurality of R 5′ s, R 6′ s and R 7 s are each identical or different with each other.
13. The method according to claim 1 , wherein the composition further comprises an acid generating agent.
14. The method according to claim 1 , wherein the composition further comprises a crosslinking agent.