Display device
An active device substrate includes a flexible substrate, an inorganic de-bonding layer, and at least one active device. The flexible substrate has a first surface and a second surface opposite to the first surface, wherein the first surface is a flat surface. The inorganic de-bonding layer covers the first surface of the flexible substrate, and the material of the inorganic de-bonding layer is metal, metal oxide or combination thereof. The active device is disposed on or above the second surface of the flexible substrate.
1. A display device, comprising:
an active device substrate comprising:
a flexible substrate having a first surface and a second surface opposite to the first surface, wherein the first surface is a flat surface;
an inorganic de-bonding layer disposed on the first surface of the flexible substrate, wherein a thickness of the inorganic de-bonding layer is about 0.001 to 1 μm, and wherein the material of the inorganic de-bonding layer comprises metal oxide; and
at least one active device disposed on or above the second surface of the flexible substrate;
a passivation layer covering the at least one active device;
a first electrode disposed on the passivation layer and electrically connected to the at least one active device;
a pixel define layer disposed on the passivation layer and the first electrode, wherein the pixel define has a pixel opening to expose a portion of the first electrode;
a luminous layer completely disposed within the pixel opening; and
a second electrode disposed on and contacting the luminous layer and the passivation layer.
2. The display device of claim 1 , wherein the inorganic de-bonding layer completely covers the first surface of the flexible substrate.
3. The display device of claim 1 , wherein the inorganic de-bonding layer has an entirely exposed surface not contacting the first surface of the flexible substrate.
4. The display device of claim 1 , wherein the material of the flexible substrate comprises polyimide (PI), polycarbonate (PC), polyethersulfone (PES), polynorbornene (PNB), polyetherimide (PEI), poly(p-phenylene benzobisimidazole) (PBI), poly(p-phenylene benzobisoxazole) (PBO), poly(p-phenylene terephthalamide)(PPTA), or a combination thereof, wherein the inorganic de-bonding layer completely covers the first surface of the flexible substrate.
5. The display device of claim 1 , wherein the thickness of the inorganic de-bonding layer is about 0.001 to 0.02 μm.
6. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises In 2 O 3 .
7. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises SnO 2 .
8. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises ZnO.
9. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises CdO or TiN.
10. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises In 2 O 3 :Sn (ITO).
11. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises ZnO:In (IZO).
12. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises ZnO:Ga (GZO).
13. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises ZnO:Al (AZO).
14. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises Sn 0 2 :F or Ti 0 2 :Ta.
15. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises CdIn 2 O 4 or Cd 2 SnO 4 .
16. The display device of claim 1 , wherein the material of the inorganic de-bonding layer comprises Zn 2 SnO 4 .
17. The display device of claim 1 , wherein the at least one active device includes a gate electrode, a channel layer, a source electrode and a drain electrode, and wherein the passivation layer contacts the channel layer and side surfaces of the source electrode and the drain electrode.
18. The display device of claim 1 , wherein the at least one active device includes a gate electrode, a channel layer, a source electrode and a drain electrode, and wherein the passivation layer contacts the gate electrode and side surfaces of the source electrode and the drain electrode.
19. The display device of claim 1 , further comprising a buffer layer disposed between the flexible substrate and the at least one active device, wherein the buffer layer completely covers the second surface of the flexible substrate, and a material of the buffer layer comprises silicon nitride.