IP Library Granted Patent US 9,419,250
Granted Patent B2
US 9,419,250 · App. 14/959,770 · Granted Aug 16, 2016

Methods of forming transfer films

Inventors: Evan L. Schwartz (Vadnais Heights, MN); Justin P. Meyer (Oakdale, MN); Olester Benson (Woodbury, MN); Terry O. Collier (Woodbury, MN); Michael Benton Free (St. Paul, MN); Robert F. Kamrath (Mahtomedi, MN); Mieczyslaw H. Mazurek (Roseville, MN); David B. Olson (Hudson, WI); K. Raveesh Shenoy (St. Paul, MN); Martin B. Wolk (Woodbury, MN)
Assignee: 3M Innovative Properties Company
H01L51/5281B29D11/00788B32B3/263B32B27/308B32B37/18B32B38/0036B32B38/06G03F7/091H01L51/0024H01L51/5275B29K2083/00B29K2995/0018B32B38/1858B32B2037/1253B32B2250/02B32B2309/10B32B2310/0831B32B2419/00B32B2457/00B32B2457/12H01L2251/5307H01L2251/5315Y10T156/10Y10T428/24521
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Quick Facts
Patent No.
US 9,419,250
App. No.
14/959,770
Granted
Aug 16, 2016
Kind
B2
Abstract

Methods of making transfer films to form bridged nanostructures are disclosed. The methods include applying a thermally stable backfill layer to a structured surface of a sacrificial template layer.

Claims (9)

1. A method of forming a transfer film, comprising:

applying a thermally stable backfill layer to a structured surface of a sacrificial template layer, the thermally stable backfill layer conforms to the structured surface of the sacrificial template layer and comprises thermally stable molecular species; and

allowing a portion of the thermally stable molecular species to migrate into the sacrificial template layer to form the transfer film.

2. The method according to claim 1 , wherein the allowing step forms a gradient of thermally stable molecular species within the sacrificial template layer and the gradient comprises a concentration of thermally stable molecular species that increases as a function of a distance from the structured surface.

3. The method according to claim 1 , wherein the sacrificial template layer is cleanly baked out leaving a bridging layer disposed on the structured surface and defining engineered voids.

4. The method according to claim 1 , wherein the thermally stable molecular species comprises a metal or metal oxide or metal oxide precursor.

5. The method according to claim 1 , wherein the thermally stable molecular species comprises an organosilicon polymer.

6. The method according to claim 4 , wherein the sacrificial template layer comprises a (meth)acrylic polymer.

7. The method according to claim 6 , wherein the (meth)acrylic polymer comprises a majority of polyether segments or a majority of ethoxylated segments.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 16, 2016
From: SCHWARTZ, EVAN L.; MEYER, JUSTIN P.; BENSON, OLESTER, JR; COLLIER, TERRY O.; FREE, MICHAEL BENTON; KAMRATH, ROBERT F.; MAZUREK, MIECZYSLAW H.; OLSON, DAVID B.; SHENOY, RAVEESH K.; WOLK, MARTIN B.
To: 3M INNOVATIVE PROPERTIES COMPANY
Reel/Frame 038606/0656 →
Continuity (2)
Division 14159300 · Jan 20, 2014
Related Publication 20160087246A1 · Mar 24, 2016