Methods of forming diodes
View Patent ↗Some embodiments include methods of forming diodes in which a first electrode is formed to have a pedestal extending upwardly from a base. At least one layer is deposited along an undulating topography that extends across the pedestal and base, and a second electrode is formed over the least one layer. The first electrode, at least one layer, and second electrode together form a structure that conducts current between the first and second electrodes when voltage of one polarity is applied to the structure, and that inhibits current flow between the first and second electrodes when voltage having a polarity opposite to said one polarity is applied to the structure. Some embodiments include diodes having a first electrode that contains two or more projections extending upwardly from a base, having at least one layer over the first electrode, and having a second electrode over the at least one layer.
1. A method of forming a diode, comprising:
etching an opening that extends through an insulative material and to a conductive base;
forming at least one sidewall spacer along sidewalls of the opening to narrow the opening, the base being exposed along a bottom of the narrowed opening;
dispersing seed material along the bottom of the narrowed opening; and growing pedestals from the dispersed seed material;
removing the at least one sidewall spacer after dispersing the seed material;
depositing one or more layers across the pedestals to form the first electrode of the diode; and
forming a second electrode over said one or more layers to form the diode.
2. The method of claim 1 wherein the dispersed seed material consists of nanocrystalline seeds.
3. The method of claim 1 wherein the one or more pedestals are comprised of the same composition as the base.
4. The method of claim 1 wherein the one or more pedestals comprise at least one composition that is not comprised by the base.
5. The method of claim 1 wherein the one or more layers are at least two layers.
6. The method of claim 1 wherein the etching the opening comprises anisotropically etching.