Structure for joining ceramic plate to metal cylindrical member
A member for semiconductor manufacturing device includes a susceptor which is a ceramic plate formed of AlN and a gas introduction pipe which is joined to the susceptor. An annular pipe joining bank is provided at a position of the susceptor facing a flange of the gas introduction pipe. In addition, a pipe brazed part is formed between the flange and the pipe joining bank. The flange has a width of 3 mm or more and a thickness of from 0.5 to 2 mm. It is preferable that the height of the pipe joining bank be 0.5 mm or more, the edge of the bank facing the outer edge of the flange. be chamfered as designated by C0.3 or more or rounded as designated by R0.3 or more.
1. A joined body comprising a ceramic plate joined to a metal cylindrical member, the joined body including:
a flange which is formed at an end of the cylindrical member so as to have an outer edge and a face surface that extends in parallel to a rear surface portion of the ceramic plate,
an annular bank which is configured to project from the rear surface portion of the ceramic plate such that the bank has an edge that is chamfered or rounded and a face surface that extends in parallel to the rear surface portion, with the face surface of the bank opposing the face surface of the flange, and
a brazed part which is formed in a space between the opposing face surfaces of the flange and the bank,
wherein the flange has a width of 3 mm or more and a thickness of from 0.5 to 2 mm, with the edge of the bank that is chamfered or rounded facing the outer edge of the flange.
2. The joined body according to claim 1 ,
wherein a height of the bank is 0.5 mm or more.
3. The joined body according to claim 1 ,
wherein the edge of the bank facing the outer edge of the flange is chamfered by 0.3 mm or more or rounded by 0.3 mm or more.
4. The joined body according to claim 1 ,
wherein the ceramic plate is formed of AlN,
the cylindrical member is formed of Kovar, and
the brazed part is formed of a brazing filler material including Ag, Cu, and Ti or an Al brazing filler material.
5. The joined body according to claim 1 ,
wherein the ceramic plate has a gas introduction hole that is opened toward inside of the bank and that penetrates through the ceramic plate in a thickness direction, and
the cylindrical member is a gas introduction pipe through which a gas is supplied to the gas introduction hole.
6. The joined body according to claim 1 ,
wherein the bank is formed along an outer circumferential edge of the ceramic plate, and
the cylindrical member is a support ring that supports the ceramic plate.
7. The joined body according to claim 1 ,
wherein a height of the bank is 0.5 mm or more and the edge of the bank facing the outer edge of the flange is chamfered by 0.3 mm or more or rounded by 0.3 mm or more,
the ceramic plate is formed of AlN and has a gas introduction hole that is opened toward inside of the bank and that penetrates through the ceramic plate in a thickness direction,
the cylindrical member is formed of Kovar and is a gas introduction pipe through which a gas is supplied to the gas introduction hole, and
the brazed part is formed of a brazing filler material including Ag, Cu, and Ti or an Al brazing filler material.
8. The joined body according to claim 1 ,
wherein a height of the bank is 0.5 mm or more, the edge of the bank facing the outer edge of the flange is chamfered by 0.3 mm or more or rounded by 0.3 mm or more, and the bank is formed along an outer circumferential edge of the ceramic plate,
the ceramic plate is formed of AlN,
the cylindrical member is formed of Kovar and is a support ring that supports the ceramic plate, and
the brazed part is formed of a brazing filler material including Ag, Cu, and Ti or an Al brazing filler material.