Granted Patent B1

US 9,659,917 · App. 14/967,009 · Granted May 23, 2017

Abstract

Claims (101)

1. A method, comprising:

dispensing a temporary adhesive onto a substrate;

placing a base die onto the temporary adhesive;

curing the temporary adhesive;

forming a die stack that includes the base die;

activating a release layer disposed on the substrate, wherein the release layer is between the substrate and the temporary adhesive;

removing the die stack from the substrate; and

removing the temporary adhesive from the die stack.

2. The method of claim 1 , further comprising:

dicing a glass material to provide the substrate, wherein the glass material includes the release layer disposed on one side of the glass material; and

placing the substrate onto a process carrier, wherein the substrate is placed over an opening in the process carrier.

3. The method of claim 1 , wherein curing the temporary adhesive comprises exposing the temporary adhesive to ultraviolet radiation.

4. The method of claim 1 , wherein forming a die stack comprises:

placing an additional die onto the base die; and

forming metallic bonds between the base die and the additional die.

5. The method of claim 1 , wherein activating a release layer disposed on the substrate comprises exposing the release layer to electromagnetic radiation of a wavelength in the range from infrared to ultraviolet.

6. The method of claim 1 , wherein removing the die stack from the substrate comprises:

picking the die stack and temporary adhesive off of the substrate, and

placing the die stack and temporary adhesive onto a carrier film so that the temporary adhesive is positioned on an opposite side of the die stack from the carrier film.

7. The method of claim 1 , wherein removing the temporary adhesive from the die stack comprises:

placing tape onto the temporary adhesive;

rolling a roller over the temporary adhesive; and

pulling the tap up and away after the roller has rolled over the temporary adhesive.

8. The method of claim 1 , wherein the substrate is formed by:

defining a shape and size of the substrate on a glass substrate, wherein the glass substrate includes the release layer formed on one side of the glass material; and

dicing the glass substrate including the release layer based on the defined size and shape.

9. A method comprising:

placing a base die onto a temporary substrate, the temporary substrate including a release layer and a temporary adhesive deposed between the temporary substrate and the base die;

exposing the temporary adhesive to ultraviolet radiation;

placing a first die onto the base die;

placing a second die onto the first die;

removing the base die and the temporary adhesive from the substrate; and

removing the temporary adhesive from the base die.

10. The method of claim 9 , further comprising:

forming a pattern on a glass substrate, wherein the glass substrate includes the release layer disposed on one side;

dicing the glass substrate based on the pattern to form the temporary substrate; and

dispensing the temporary adhesive on the release layer.

11. The method of claim 9 , wherein placing the first die onto the base die further comprises:

placing the first die onto the base die so that a top side of the first die is adjacent to a bottom side of the base die.

12. The method of claim 9 , wherein placing the second die onto the first die further comprises:

placing the second die onto the first die so that a top side of the second die is adjacent to a bottom side of the first die.

13. The method of claim 9 , further comprising:

performing thermo-compression bonding while placing the first die; and

performing thermo-compression bonding while placing the second die.

14. The method of claim 9 , further comprising performing a metal reflow process on the base die, the first die, and the second die.

15. The method of claim 9 , wherein removing the base die and the temporary adhesive from the substrate comprises:

exposing the release layer to electromagnetic radiation;

removing the temporary adhesive and the base die from the temporary substrate; and

positioning the temporary adhesive and base die for removal of the temporary adhesive.

16. The method of claim 9 , wherein removing the temporary adhesive comprises:

placing tape on the temporary adhesive;

rolling a roller over the tape placed on the temporary adhesive; and

pulling up the tape up after the roller has rolled over the tape, wherein the temporary adhesive pulls off of the base die with pulling up of the tape.

17. A method, comprising:

placing a process substrate onto a process carrier, wherein the process substrate includes a release layer on one side, and wherein the side of the process substrate that includes the release layer is positioned opposite the process carrier;

dispensing a temporary adhesive on the release layer;

placing a base die onto the temporary adhesive;

curing the temporary adhesive;

stacking a plurality of die, one onto the other, on the base die;

forming a die stack;

removing the process substrate from the die stack;

removing the temporary adhesive from the die stack; and

performing electrical testing on the die stack.

18. The method of claim 17 , wherein placing a process substrate onto process carrier comprises placing the process substrate over an opening in the process carrier, wherein the opening provides for access to a bottom side of the process substrate.

19. The method of claim 17 , wherein curing the temporary adhesive comprises exposing the temporary adhesive to ultraviolet radiation through a bottom side of the process substrate.

20. The method of claim 17 , wherein forming the die stack comprises forming metallic bonds between adjacent die of the die plurality of die and between a die of the plurality of die and the base die.

21. The method of claim 17 , wherein removing the process substrate from the die stack comprises:

exposing the release layer to electromagnetic radiation to release the release layer;

removing the die stack including the temporary adhesive from the process substrate; and

placing the die stack onto a carrier film, wherein the die stack is placed on the carrier film with the temporary adhesive exposed on a top side.

22. The method of claim 17 , wherein removing the temporary adhesive from the die stack comprises:

placing tape on the temporary adhesive;

rolling a roller over the temporary adhesive while pulling up the tape, wherein the tape pulls the temporary adhesive from the die stack.

23. A method, comprising:

placing a plurality of process substrates onto a process carrier, wherein each process substrate of the plurality of process substrates is placed over a respective opening in the process carrier, and wherein each process substrate includes a release layer on a side of the process substrate opposite the process carrier;

iteratively dispensing a temporary adhesive onto the release layer of each of the plurality of process substrates; iteratively placing a plurality of base die onto respective ones of the process substrates, wherein each of the plurality of base die are placed on the temporary adhesive;

curing the temporary adhesive;

forming a plurality of die stacks with each of the plurality of base die;

activating the release layer included on each of the plurality of process substrates;

removing each of the plurality of die stacks including the respective temporary adhesive; and

removing the respective temporary adhesive from each of the plurality of die stacks.

24. The method of claim 23 , wherein curing the temporary adhesive comprises individually exposing the temporary adhesive dispensed on each of the process substrates to ultraviolet radiation through their respective process substrates.

25. The method of claim 23 , wherein curing the temporary adhesive comprises simultaneously exposing the temporary adhesive dispensed on each of the process substrates to ultraviolet radiation through their respective process substrates.

26. The method of claim 23 , wherein activating the release layer included on each of the plurality of process substrates comprises individually exposing the release layer included on each of the plurality of process substrates to electromagnetic radiation through their respective process substrates.

27. The method of claim 23 , wherein activating the release layer included on each of the plurality of process substrates comprises simultaneously exposing the release layer included on each of the plurality of process substrates to electromagnetic radiation through their respective process substrates.

28. A method, comprising:

dispensing temporary adhesive onto each of a plurality of process substrates, wherein the temporary adhesive is dispensed on a release layer included on each of the plurality of process substrates;

placing one of a plurality of base die onto the temporary adhesive dispensed on each of the plurality of process substrates;

curing the temporary adhesive dispensed on each of the plurality of process substrates;

forming a respective die stack on each of the plurality of process substrates, wherein the respective die stack formed on each of the plurality of process substrates includes a respective base die;

removing the respective die stack and the temporary adhesive from each of the plurality of process substrates; and

removing the temporary adhesive from the respective die stack from each of the plurality process substrates.

29. The method of claim 28 , further comprising dispensing an underfill material between adjacent die of each of the respective dies stacks formed on each of the plurality of process substrates.

30. The method of claim 28 , wherein curing the temporary adhesive dispensed on each of the plurality of process substrates comprises individually curing the temporary adhesive dispensed on each of the plurality of process substrates.

31. The method of claim 28 , wherein removing the respective die stack and the temporary adhesive from each of the plurality of process substrates comprises:

individually exposing the release layer included on each of the plurality of process substrates to electromagnetic radiation of a wavelength in the range from infrared to ultraviolet; and

individually placing respective die stacks and the temporary adhesive from each of the plurality of process substrates on a carrier film, wherein the temporary adhesive is opposite the carrier film.

32. The method of claim 28 , removing the temporary adhesive from the respective die stack from each of the plurality process substrates comprises:

placing tape on temporary adhesive from each of the respective die stacks from each of the plurality of process substrates;

rolling a roller over the tape; and

pulling the tape away from each of the respective die stacks from each of the plurality of process substrates as the roller rolls pass, wherein the tape will pull the temporary adhesive from each of the respective die stacks from each of the plurality of process substrates.

Assignments (8)