Method to co-integrate SiGe and Si channels for finFET devices
View Patent ↗A method for co-integrating finFETs of two semiconductor material types, e.g., Si and SiGe, on a bulk substrate is described. Fins for finFETs may be formed in an epitaxial layer of a first semiconductor type, and covered with an insulator. A portion of the fins may be removed to form voids in the insulator, and the voids may be filled by epitaxially growing a semiconductor material of a second type in the voids. The co-integrated finFETs may be formed at a same device level.
1. A method comprising:
forming a plurality of fins that includes:
forming a first fin by forming a first portion from a silicon substrate, the first portion extending outward from a surface of the silicon substrate;
epitaxially growing a second portion with a first semiconductor material, the second portion extending outward from a surface of the first portion; and
epitaxially growing a second fin of a second semiconductor material, the second fin extending outward from the surface of the silicon substrate.
2. The method of claim 1 , wherein the first semiconductor material comprises SiGe and the second semiconductor material comprises Si and lacks Ge.
3. The method of claim 2 , wherein the first semiconductor material has p-type conductivity.
4. The method of claim 3 , wherein the second semiconductor material has n-type conductivity.
5. The method of claim 1 , wherein forming the first fin includes:
epitaxially growing a layer of the first semiconductor material on the silicon substrate;
defining a of fin feature by lithographically patterning a resist mask; and
etching the first fin in the layer of the first semiconductor material.
6. The method of claim 5 , wherein the lithographically patterning and etching includes at least a portion of a sidewall image transfer process.
7. The method of claim 5 , further including depositing an insulator to cover the first fin.
8. The method of claim 7 , further including:
removing a portion of the insulator;
removing the resist mask;
depositing additional insulator;
planarizing the additional insulator; and
forming a hard mask layer on the additional insulator after the planarizing.
9. The method of claim 1 , wherein forming the first portion includes:
epitaxially growing the first semiconductor material to have a thickness between 10 nm and 100 nm.
10. The method of claim 9 , wherein forming the first portion includes:
forming the first portion to have a width between 5 nm and 50 nm by etching the first semiconductor material.
11. A method comprising:
forming a plurality of p-type fins, each fin of the plurality of p-type fins including a source region, a drain region, and a channel extending between the source and drain regions,
the forming the plurality of p-type fins including:
forming a first portion of each fin of the plurality of p-type fins from a silicon substrate, the first portion extending outward from a surface of the silicon substrate; and
epitaxially growing a second portion on the first portion of each fin, the second portion extending outward from a surface of the first portion, the second portion including a first semiconductor material that is different than the silicon substrate;
forming a plurality of n-type fins from the silicon substrate, the plurality of n-type fins being co-integrated with the plurality of p-type fins on the silicon substrate, the plurality of n-type fins being adjacent to the plurality of p-type fins, each fin of the plurality of n-type fins including a source region, a drain region, and a channel extending between the source and drain regions; and
forming a gate overlying the plurality of n-type fins and the plurality of p-type fins, the gate being oriented transverse to the pluralities of n-type and p-type fins.
12. The method of claim 11 , wherein forming the plurality of p-type fins includes:
epitaxially growing a layer of the first semiconductor material on the silicon substrate;
defining a plurality of fin features by lithographically patterning a resist mask; and
etching the plurality of p-type fins in the layer of the first semiconductor material.
13. The method of claim 12 , wherein the lithographically patterning and etching include a sidewall image transfer process.
14. The method of claim 12 , further including depositing an insulator to cover the plurality of p-type fins.
15. The method of claim 14 , further including:
removing a portion of the insulator;
removing the resist mask;
depositing additional insulator;
planarizing the additional insulator; and
forming a hard mask layer on the additional insulator after the planarizing.
16. A method comprising:
forming a first finFET on a silicon substrate, the first finFET including a first fin having a first portion and a second portion, the forming the first finFET including:
forming the first portion of a first semiconductor material, the first portion extending outward from a surface of the silicon substrate; and
epitaxially-growing the second portion of a second semiconductor material, the second portion extending outward from a surface of the first portion, the second semiconductor material being different than the first semiconductor material; and
epitaxially-growing a second finFET of the first semiconductor material on the silicon substrate, the second finFET including a second fin that extends outward from the surface of the silicon substrate.
17. The method of claim 16 , wherein the first semiconductor material comprises Si and the second semiconductor material comprises SiGe.
18. The method of claim 16 , further comprising forming an insulating layer abutting the first and second fins.
19. The method of claim 11 , further including forming voids by removing a portion of the plurality of p-type fins, and wherein forming the plurality of n-type fins includes filling the voids by epitaxially growing a second semiconductor material in the voids.
20. The method of claim 11 , wherein the plurality of n-type fins is aligned in a same direction as the plurality of p-type fins.
21. The method of claim 15 , further including:
covering a first area of the hard mask layer and a first subset of the plurality of p-type fins by lithographically patterning a resist layer;
exposing a second subset of the plurality of p-type fins by etching a second area of the hard mask layer and the additional insulator; and
forming voids by removing the second subset of the plurality of p-type fins.
22. The method of claim 21 , further including filling the voids by epitaxially growing a second semiconductor material in the void.
23. The method of claim 22 , wherein filling the voids includes epitaxially growing the second semiconductor material to a height that is approximately equal to a height of the additional insulator.
24. The method of claim 22 , further comprising etching the insulator to expose the plurality of p-type fins and the plurality of n-type fins.
25. The method of claim 24 , wherein etching the insulator includes using a SiCoNi etching process.
26. A method, comprising:
forming a first fin including:
forming a lower portion in which a first semiconductor material extends vertically upward from an upper surface of a silicon substrate; and
forming an upper portion in which a second, epitaxially-grown, semiconductor material extends vertically upward from said lower portion, the second, epitaxially-grown, semiconductor material being different from the first semiconductor material; and
forming a second fin extending vertically upward from the upper surface of the silicon substrate and being epitaxially grown from the first semiconductor material.
27. The method of claim 26 , wherein the upper portion is epitaxially grown from the lower portion.
28. The method of claim 26 , further including forming an insulating layer abutting the first and second fins.
29. A method, comprising:
forming a plurality of n-type fins formed from a silicon substrate, each n-type fin including a source region, a drain region, and a channel extending between the source and drain regions;
forming a plurality of p-type fins co-integrated with the plurality of n-type fins on the silicon substrate, the p-type fins including a first portion that is formed from the silicon substrate, the p-type fins being adjacent to, and aligned in a same direction as, the plurality of n-type fins, each p-type fin including a source region, a drain region, and a channel extending between the source and drain regions, the p-type fins including a second portion formed on the first portion, the second portion including a semiconductor material that is different from the silicon substrate; and
forming a gate overlying the fins, the gate being oriented transverse to each of the pluralities of fins.
30. The method of claim 29 , wherein the second portion is epitaxially grown from the first portion.
31. The method of claim 29 , further including forming voids by removing a portion of the plurality of p-type fins, and wherein forming the plurality of n-type fins includes filling the voids by epitaxially growing a second semiconductor material in the voids.