Memory cell with independently-sized electrode
Memory cell architectures and methods of forming the same are provided. An example memory cell can include a switch element and a memory element. A middle electrode is formed between the memory element and the switch element. An outside electrode is formed adjacent the switch element or the memory element at a location other than between the memory element and the switch element. A lateral dimension of the middle electrode is different than a lateral dimension of the outside electrode.
1. A method for forming a memory cell, comprising:
forming a switch element between a first electrode and a second electrode;
forming a memory element between the second electrode and a third electrode; and
changing a lateral dimension of the second electrode to be less than a lateral dimension of the first electrode and the third electrode,
wherein changing the lateral dimension of the second electrode includes isotropically etching the second electrode with an O 2 -based plasma with a bias voltage of an etching chamber turned off.
2. The method of claim 1 , wherein changing the lateral dimension of the second electrode includes changing a lateral dimension of the second electrode to be less than a lateral dimension of the memory element.
3. The method of claim 1 , wherein forming the second electrode includes forming the second electrode from a material that is different than a material from which the first and third electrodes are formed.
4. The method of claim 1 , wherein forming the second electrode includes forming the second electrode from a material that has a higher etch rate with O 2 -based chemistries than a material from which the first and third electrodes are formed.
5. The method of claim 1 , wherein forming the second electrode includes forming the second electrode from CNx and wherein forming the first electrode and forming the third electrode include forming the first and third electrodes from a material other than CNx.
6. The method of claim 1 , wherein forming the second electrode includes forming the second electrode from CNx and wherein forming the first and third electrodes include forming the first and third electrodes from C.
7. A method for forming a memory cell, comprising:
forming a stack of materials, the stack of materials including a first electrode, a switch element, a second electrode, a memory element, and a third electrode, the second electrode being located between the switch element and the memory element; and
etching, via a selective/isotropic process, the second electrode to have a first lateral dimension less than a first lateral dimension of the first electrode and a first lateral dimension of the third electrode and a second lateral dimension of the first electrode less than a second lateral dimension of the first electrode and a first lateral dimension of the third electrode.
8. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching the second electrode at a greater rate than an etching rate of the first and third electrodes.
9. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching the second electrode at a substantially greater rate than an etching rate of the memory element and the switch element.
10. The method of claim 7 , wherein forming the stack of materials includes forming the first and third electrodes of carbon, and forming the second electrode of CNx.
11. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching the second electrode at a substantially greater rate than an etching rate of an inorganic hard mask used to pattern a conductive line over the stack of materials.
12. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching, via the selective/isotropic process, the second electrode after forming the stack of materials to be self-aligned with a conductive line formed over the stack of materials.
13. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching, via the selective/isotropic process, the second electrode after forming the stack of materials to be self-aligned with a conductive line beneath the stack of materials and before forming the stack of materials to be self-aligned with a conductive line over the stack of materials.
14. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching, via the selective/isotropic process, the one of the first, the second, and the third electrodes and etching others of the first, the second, and the third electrodes to be self-aligned with a word line.
15. The method of claim 7 , wherein etching, via the selective/isotropic process, one of the first, the second, and the third electrodes includes etching, via the selective/isotropic process, the one of the first, the second and the third electrodes and etching others of the first, the second, and the third electrodes to be self-aligned with a bit line.
16. A memory cell, comprising:
a stack of materials including a first electrode, a switch element, a second electrode, a memory element, and a third electrode, wherein the second electrode is located between the switch element and the memory element; and
wherein the second electrode has a first lateral dimension less than a first lateral dimension of the first electrode and the third electrode and a second lateral dimension less than a second lateral dimension of the first electrode and the third electrode.
17. A method for forming a memory cell, comprising:
forming a switch element between a first electrode and a second electrode;
forming a memory element between the second electrode and a third electrode; and
subsequently changing a lateral dimension of the second electrode to be less than a lateral dimension of the first electrode,
wherein the second electrode is formed from a material that has a higher etch rate with O 2 -based chemistries than a material from which the first and third electrodes are formed.
18. The method of claim 17 , wherein forming the second electrode from the material that has the higher etch rate with O 2 -based chemistries includes forming the second electrode from a material that can be etched with O 2 -based chemistries substantially without etching the memory element or switch element.
19. A method for forming a memory cell, comprising:
forming a stack of materials, the stack of materials including a first electrode, a switch element, a second electrode, a memory element, and a third electrode, the second electrode being located between the switch element and the memory element; and
subsequent to forming the stack of materials, etching, via a selective/isotropic process, one of the first, the second, and the third electrode to have a lateral dimension less than a lateral dimension of the other electrodes, wherein etching, via the selective/isotropic process, one of the first, the second and the third electrodes includes etching one of:
the second electrode at a greater etching rate than an etching rate of the first and third electrodes;
the second electrode at a substantially greater etching rate than an etching rate of the memory element and the switch element; and
the second electrode at a substantially greater etching rate than an etching rate of an inorganic hard mask used to pattern a conductive line over the stack of materials.