IP Library Granted Patent US 9,666,669
Granted Patent B1
US 9,666,669 · App. 14/978,430 · Granted May 30, 2017

Superlattice lateral bipolar junction transistor

Inventors: Karthik Balakrishnan (White Plains, NY); Stephen W. Bedell (Wappingers Falls, NY); Pouya Hashemi (White Plains, NY); Bahman Hekmatshoartabari (White Plains, NY); Alexander Reznicek (Troy, NY)
Assignee: International Business Machines Corporation
H01L29/0684H01L29/152H01L29/165H01L29/66242H01L29/7378
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Quick Facts
Patent No.
US 9,666,669
App. No.
14/978,430
Granted
May 30, 2017
Kind
B1
Abstract

A bipolar junction transistor includes an intrinsic base formed on a substrate. The intrinsic base includes a superlattice stack including a plurality of alternating layers of semiconductor material. A collector and emitter are formed adjacent to the intrinsic base on opposite sides of the base. An extrinsic base structure is formed on the intrinsic base.

Claims (23)

1. A bipolar junction transistor, comprising:

an intrinsic base formed on a substrate, the intrinsic base including a superlattice stack including a plurality of alternating layers of semiconductor material;

a collector and emitter formed adjacent to the intrinsic base on opposite sides of the base; and

an extrinsic base structure formed on the intrinsic base.

2. The transistor as recited in claim 1 , wherein the superlattice stack includes alternating materials in the alternating layers.

3. The transistor as recited in claim 1 , wherein the alternating layers include Si and Ge.

4. The transistor as recited in claim 1 , wherein the superlattice stack includes a bottom-most layer that extends below the collector and emitter to function as a seed layer to form the collector and emitter.

5. The transistor as recited in claim 1 , wherein the superlattice stack is formed on an extremely thin semiconductor-on-insulator (ETSOI) substrate.

6. The transistor as recited in claim 5 , wherein a semiconductor layer of the ETSOI substrate forms a layer of the superlattice stack.

7. The transistor as recited in claim 1 , further comprising a strained layer on which the superlattice stack is formed.

8. The transistor as recited in claim 7 , wherein the strained layer includes a mass variance configured to increase thermal conductivity of the strained layer by isotope enrichment of the strained layer.

9. The transistor as recited in claim 1 , wherein the superlattice stack includes a mass variance configured to increase thermal conductivity of the superlattice stack by isotope enrichment of the superlattice stack.

10. A bipolar junction transistor, comprising:

an extremely thin semiconductor-on-insulator substrate (ETSOI) having a semiconductor layer formed on a buried dielectric layer;

a superlattice stack including a plurality of alternating layers of semiconductor material wherein a first layer of the plurality of alternating layers includes the semiconductor layer;

an intrinsic base formed from the superlattice stack;

a collector and emitter formed adjacent to the intrinsic base on opposite sides of the intrinsic base; and

an extrinsic base structure formed on the intrinsic base.

11. The transistor as recited in claim 10 , wherein the alternating layers include Si and Ge.

12. The transistor as recited in claim 10 , wherein the semiconductor layer extends below the collector and emitter to function as a seed layer to form the collector and emitter.

13. The transistor as recited in claim 10 , further comprising a strained layer on which the superlattice stack is formed.

14. The transistor as recited in claim 13 , wherein the strained layer includes a mass variance configured to increase thermal conductivity of the strained layer by isotope enrichment of the strained layer.

15. The transistor as recited in claim 10 , wherein the superlattice stack includes a mass variance configured to increase thermal conductivity of the superlattice stack by isotope enrichment of the superlattice stack.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 13, 2020
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ELPIS TECHNOLOGIES INC.
Reel/Frame 052644/0868 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 22, 2015
From: BALAKRISHNAN, KARTHIK; BEDELL, STEPHEN W.; HASHEMI, POUYA; HEKMATSHOARTABARI, BAHMAN; REZNICEK, ALEXANDER
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 037350/0899 →