IP Library Granted Patent US 10,446,704
Granted Patent B2
US 10,446,704 · App. 14/984,512 · Granted Oct 15, 2019

Formation of Ohmic back contact for Ag

Inventors: Talia S. Gershon (White Plains, NY); Oki Gunawan (Westwood, NJ); Richard A. Haight (Mahopac, NY); Ravin Mankad (Yonkers, NY)
Assignee: International Business Machines Corporation
H01L31/0326H01L31/022425H01L31/072Y02E10/50
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,446,704
App. No.
14/984,512
Granted
Oct 15, 2019
Kind
B2
Abstract

Techniques for forming an ohmic back contact for Ag 2 ZnSn(S,Se) 4 photovoltaic devices. In one aspect, a method for forming a photovoltaic device includes the steps of: depositing a refractory electrode material onto a substrate; depositing a contact material onto the refractory electrode material, wherein the contact material includes a transition metal oxide; forming an absorber layer on the contact material, wherein the absorber layer includes Ag, Zn, Sn, and at least one of S and Se; annealing the absorber layer; forming a buffer layer on the absorber layer; and forming a top electrode on the buffer layer. The refractory electrode material may be Mo, W, Pt, Ti, TiN, FTO, and combinations thereof. The transition metal oxide may be TiO 2 , ZnO, SnO, ZnSnO, Ga 2 O 3 , and combinations thereof. A photovoltaic device is also provided.

Claims (22)

1. A method for forming a photovoltaic device, the method comprising the steps of:

depositing a refractory electrode material onto a substrate;

depositing a contact material onto the refractory electrode material, wherein the contact material comprises a transition metal oxide with a work function below about 4.5 electronvolts (eV), and wherein the contact material as deposited is in direct physical contact with the refractory electrode material;

forming an absorber layer directly on the contact material, wherein the absorber layer comprises silver (Ag), zinc (Zn), tin (Sn), and at least one of sulfur (S) and selenium (Se);

annealing the absorber layer;

forming a buffer layer on the absorber layer; and

forming a top electrode on the buffer layer.

2. The method of claim 1 , wherein the substrate comprises a glass, a ceramic, a metal foil, or a plastic substrate.

3. The method of claim 1 , wherein the refractory electrode material is selected from the group consisting of: molybdenum (Mo), tungsten (W), platinum (Pt), titanium (Ti), titanium nitride (TiN), fluorinated tin oxide (FTO), and combinations thereof.

4. The method of claim 1 , wherein the refractory electrode material has a thickness of from about 0.5 micrometer to about 2 micrometers, and ranges therebetween.

5. The method of claim 1 , wherein the transition metal oxide is selected from the group consisting of: titanium oxide (TiO 2 ), zinc oxide (ZnO), tin oxide (SnO), zinc tin oxide (ZnSnO), gallium oxide (Ga 2 O 3 ), and combinations thereof.

6. The method of claim 1 , wherein the transition metal oxide comprises TiO 2 .

7. The method of claim 1 , wherein the contact material has a thickness of from about 5 nanometers to about 100 nanometers, and ranges therebetween.

8. The method of claim 1 , wherein the absorber layer is annealed at a temperature of from about 400° C. to about 550° C., and ranges therebetween, for a duration of from about 20 seconds to about 10 minutes, and ranges therebetween.

9. The method of claim 1 , wherein the buffer layer comprises a buffer material selected from the group consisting of: copper(I) oxide (Cu 2 O), nickel(II) oxide (NiO), zinc telluride (ZnTe), aluminum phosphide (AlP), molybdenum trioxide (MoO 3 ), cadmium telluride (CdTe), copper(I) iodide (CuI), molybdenum(IV) oxide (MoO 2 ), molybdenum disulfide (MoS 2 ), molybdenum diselenide (MoSe 2 ), and combinations thereof.

10. The method of claim 1 , wherein the buffer layer comprises MoO 3 .

11. The method of claim 1 , wherein the top electrode comprises a transparent conductive oxide.

12. The method of claim 11 , wherein the transparent conductive oxide is selected from the group consisting of: indium-tin-oxide, aluminum-doped zinc oxide, and combinations thereof.

13. The method of claim 11 , further comprising the step of:

forming metal contacts on the top electrode.

14. The method of claim 13 , wherein the metal contacts comprise a metal selected from the group consisting of: gold (Au), silver (Ag), aluminum (Al), nickel (Ni), and combinations thereof.

15. The method of claim 1 , wherein the transition metal oxide is selected from the group consisting of: TiO 2 , SnO, ZnSnO, Ga 2 O 3 , and combinations thereof.

Assignments (3)
CONFIRMATORY LICENSE Recorded Feb 6, 2017
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 041630/0862 →
CONFIRMATORY LICENSE Recorded Jun 6, 2016
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 038990/0286 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 24, 2016
From: GERSHON, TALIA S.; GUNAWAN, OKI; HAIGHT, RICHARD A.; MANKAD, RAVIN
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 037567/0194 →
Continuity (1)
Related Publication 20170194518A1 · Jul 6, 2017