Source material for electronic device applications
View Patent ↗Various embodiments include methods and apparatuses comprising methods for formation of and apparatuses including a source material for electronic devices. One such apparatus includes a vertical string of memory cells comprising a plurality of alternating levels of conductor and dielectric material, a semiconductor material extending through the plurality of alternating levels of conductor material and dielectric material, and a source material coupled to the semiconductor material. The source material includes a titanium nitride layer and a source polysilicon layer in direct contact with the titanium nitride layer. Other methods and apparatuses are disclosed.
1. A method, comprising:
forming a source material;
forming a titanium nitride layer on a first side of and in direct contact with the source material with no intervening dielectric layer or native oxide layer located between the titanium nitride layer and the source material; and
forming a string of memory cells over a second side of the source material, the string of memory cells including a channel material, a first end of the channel material being in contact with the second side of the source material, the second side of the source material opposing the first side of the source material, the first side of the source material being distal to the channel material.
2. The method of claim 1 , further comprising forming a peripheral support device layer coupled to a second side of the titanium nitride layer, the second side of the titanium nitride layer being distal from the source material.
3. The method of claim 2 , further comprising forming a dielectric layer between the titanium nitride layer and the peripheral support device layer.
4. The method of claim 1 , further comprising forming a metallization contact from the second side of the source material to a second end of the channel material.
5. The method of claim 1 , further comprising selecting the source material to comprise doped polysilicon.
6. A method, comprising:
forming a tier layer;
forming a semiconductor material extending through the tier layer;
forming a source polysilicon layer coupled to the semiconductor material on a first side of the source polysilicon layer; and
forming a titanium nitride layer coupled directly on a second side of the source polysilicon layer without forming a metal silicide layer therebetween, the second side of the source polysilicon layer being on an opposing side from the first side of the source polysilicon layer.
7. The method of claim 6 , wherein forming the tier layer comprises forming a vertical string of memory cells comprising a plurality of alternating levels of conductor material and dielectric material.
8. The method of claim 6 , wherein the titanium nitride layer is coupled to the second side of the source polysilicon layer without intervening oxides.
9. A method, comprising:
forming a titanium nitride layer having a resistivity in the range of about 60 μOhm-cm to about 100 μOhm-cm;
forming a source polysilicon layer coupled to the titanium nitride layer on a first side of the source polysilicon layer with no intervening dielectric layer or native oxide layer located between the titanium nitride layer and the source polysilicon layer; and
forming a string of memory cells over a second side of the source polysilicon layer, the second side of the source polysilicon layer being on an opposing side from the first side of the source polysilicon layer.
10. The method of claim 9 , further comprising forming the source polysilicon layer in direct contact with the titanium nitride layer.
11. The method of claim 10 , further comprising:
forming a channel material coupled on a first end to the second side of the source polysilicon layer; and
forming a first metallization contact from a side of the titanium nitride layer that is in contact with the source polysilicon layer to a second end of the channel material.
12. The method of claim 9 , further comprising forming a second metallization contact from a side of the titanium nitride layer that is opposite the source polysilicon layer to a second end of the channel material.
13. A method of forming a source material, the method comprising:
forming a titanium nitride layer having a substantially cubic titanium nitride crystal structure with a {220} orientation;
forming a source polysilicon coupled on a first side to the titanium nitride layer with no intervening dielectric layer or native oxide layer located between the titanium nitride layer and the source polysilicon; and
forming a string of memory cells over a second side of the source polysilicon, the second side of the source polysilicon being on an opposing side from the first side of the source polysilicon.
14. The method of claim 13 , further comprising selecting the titanium nitride layer to have a resistivity less than about 100 μOhm-cm.