Method of manufacturing semiconductor device
To improve a semiconductor device having a nonvolatile memory. A first MISFET, a second MISFET, and a memory cell are formed, and a stopper film made of a silicon oxide film is formed thereover. Then, over the stopper film, a stress application film made of a silicon nitride film is formed, and the stress application film over the second MISFET and the memory cell is removed. Thereafter, heat treatment is performed to apply a stress to the first MISFET. Thus, a SMT is not applied to each of elements, but is applied selectively. This can reduce the degree of degradation of the second MISFET due to H (hydrogen) in the silicon nitride film forming the stress application film. This can also reduce the degree of degradation of the characteristics of the memory cell due to the H (hydrogen) in the silicon nitride film forming the stress application film.
1. A method of manufacturing a semiconductor device,
comprising the steps of:
(a) providing a semiconductor substrate having a first MISFET formed in a first region, and a nonvolatile memory formed in a second region;
(b) forming a first insulating film over the first MISFET and the nonvolatile memory cell;
(c) forming a second insulating film over the first insulating film;
(d) removing the second insulating film in the second region therefrom; and
(e) after the step (d), performing heat treatment to apply a stress to the first MISFET,
wherein the nonvolatile memory cell has a first gate electrode formed over the semiconductor substrate, and a first gate insulating film formed between the first gate electrode and the semiconductor substrate and having a charge storage portion in the inside thereof.
2. A method of manufacturing a semiconductor device according to claim 1 , further comprising the step of:
(f) after the step (e), removing the second insulating film.
3. A method of manufacturing a semiconductor device according to claim 1 ,
wherein, after the step (d), a thickness of the first insulating film in the second region is smaller than the thickness of the first insulating film in the first region.
4. A method of manufacturing a semiconductor device according to claim 3 , further comprising the step of:
(g) after the step (f), removing the first insulating film.
5. A method of manufacturing a semiconductor device according to claim 4 , further comprising the step of:
(h) after the step (g), forming a silicide film over each of source/drain regions of the first MISFET or the nonvolatile memory cell formed in the semiconductor substrate made of a silicon substrate.
6. A method of manufacturing a semiconductor device according to claim 1 ,
wherein the first insulating film is a silicon oxide film, and the second insulating film is a silicon nitride film.
7. A method of manufacturing a semiconductor device according to claim 3 , further comprising the steps of:
(g1) prior to the step (f), forming, over the first insulating film and the second insulating film, a third insulating film made of the same material as that of the first insulating film;
(g2) removing the third insulating film and the second insulating film in the first region therefrom; and
(g3) after the step (g2), removing the first insulating film and the third insulating film in the second region therefrom and removing the first insulating film in the first region therefrom.
8. A method of manufacturing a semiconductor device according to claim 2 , further comprising, between the steps (b) and (c), the step of:
removing a part of the first insulating film in the first region from a surface thereof such that a thickness of the first insulating film in the first region is smaller than the thickness of the first insulating film in the second region.
9. A method of manufacturing a semiconductor device according to claim 1 ,
wherein the nonvolatile memory cell has a second gate electrode formed over the semiconductor substrate to be adjacent to the first gate electrode, and a second gate insulating film formed between the second gate electrode and the semiconductor substrate.
10. A method of manufacturing a semiconductor device according to claim 1 ,
wherein the nonvolatile memory cell has, as a charge storage portion, a second gate electrode formed over the semiconductor substrate via a fourth insulating film, and
wherein the first gate insulating film having the charge storage portion in the inside thereof has the fourth insulating film, the second gate electrode, and a fifth insulating film over the second gate electrode.