IP Library Granted Patent US 9,590,066
Granted Patent B2
US 9,590,066 · App. 14/991,792 · Granted Mar 7, 2017

Transistors, memory cells and semiconductor constructions

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Quick Facts
Patent No.
US 9,590,066
App. No.
14/991,792
Granted
Mar 7, 2017
Kind
B2
Abstract

Some embodiments include a semiconductor construction having a gate extending into a semiconductor base. Conductively-doped source and drain regions are within the base adjacent the gate. A gate dielectric has a first segment between the source region and the gate, a second segment between the drain region and the gate, and a third segment between the first and second segments. At least a portion of the gate dielectric comprises ferroelectric material. In some embodiments the ferroelectric material is within each of the first, second and third segments. In some embodiments, the ferroelectric material is within the first segment or the third segment. In some embodiments, a transistor has a gate, a source region and a drain region; and has a channel region between the source and drain regions. The transistor has a gate dielectric which contains ferroelectric material between the source region and the gate.

Claims (34)

1. A semiconductor construction, comprising:

a silicon-containing semiconductor base;

a gate extending into the silicon-containing semiconductor base; a first region of the silicon-containing semiconductor base adjacent the gate being a conductively-doped source region, and a second region of the silicon-containing semiconductor base adjacent the gate and spaced from the first region being a conductively-doped drain region;

a gate dielectric comprising a first segment between the conductively-doped source region and the gate, a second segment between the conductively-doped drain region and the gate, and a third segment between the first and second segments;

wherein at least a portion of the gate dielectric comprises ferroelectric material;

wherein the gate dielectric, along a cross-section, is configured as an upwardly-opening container having the gate therein;

wherein the first segment of the gate dielectric comprises a first leg of the upwardly-opening container, the second segment of the gate dielectric comprises a second leg of the upwardly-opening container, and the third segment of the gate dielectric comprises a bottom of the upwardly-opening container;

wherein at least a portion of the gate dielectric comprises a first material as an outer boundary of the upwardly-opening container and which is directly against the silicon-containing semiconductor base, and comprises a second material between the first material and the gate;

wherein the second material is the ferroelectric material;

wherein the first material is a non-ferroelectric material; and

wherein the ferroelectric material is only within the first segment.

2. A semiconductor construction, comprising:

a silicon-containing semiconductor base;

a gate extending into the silicon-containing semiconductor base; a first region of the silicon-containing semiconductor base adjacent the gate being a conductively-doped source region, and a second region of the silicon-containing semiconductor base adjacent the gate and spaced from the first region being a conductively-doped drain region;

a gate dielectric comprising a first segment between the conductively-doped source region and the gate, a second segment between the conductively-doped drain region and the gate, and a third segment between the first and second segments;

wherein at least a portion of the gate dielectric comprises ferroelectric material;

wherein the gate dielectric, along a cross-section, is configured as an upwardly-opening container having the gate therein;

wherein the first segment of the gate dielectric comprises a first leg of the upwardly-opening container, the second segment of the gate dielectric comprises a second leg of the upwardly-opening container, and the third segment of the gate dielectric comprises a bottom of the upwardly-opening container;

wherein at least a portion of the gate dielectric comprises a first material as an outer boundary of the upwardly-opening container and which is directly against the silicon-containing semiconductor base, and comprises a second material between the first material and the gate;

wherein the second material is the ferroelectric material;

wherein the first material is a non-ferroelectric material; and

wherein the ferroelectric material is only within the third segment.

3. A semiconductor construction, comprising:

a silicon-containing semiconductor base;

a gate extending into the silicon-containing semiconductor base; a region of the silicon-containing semiconductor base on one side of the gate being a conductively-doped source region, and a region of the silicon-containing semiconductor base on an opposing side of the gate relative to said one side being a conductively-doped drain region; the conductively-doped drain region being more heavily doped than the conductively-doped source region;

a gate dielectric comprising a first segment between the conductively-doped source region and the gate, a second segment between the conductively-doped drain region and the gate, and a third segment between the first and second segments;

wherein the gate dielectric, along a cross-section, is configured as an upwardly-opening container having the gate therein; wherein the first segment of the gate dielectric comprises a first leg of the upwardly-opening container, wherein the second segment of the gate dielectric comprises a second leg of the upwardly-opening container, and wherein the third segment of the gate dielectric comprises a bottom of the upwardly-opening container;

the gate dielectric comprising non-ferroelectric material directly against ferroelectric material, with the non-ferroelectric material being a boundary of the upwardly-opening container directly against the silicon-containing semiconductor base; and

wherein the non-ferroelectric material is thicker along the bottom of the upwardly-opening container than along the first and second legs of the upwardly-opening container.

4. The semiconductor construction of claim 3 wherein the non-ferroelectric material comprises one or both of silicon dioxide and silicon nitride.

5. The semiconductor construction of claim 3 further comprising a capacitor electrically coupled to the conductively-doped drain region.

6. The semiconductor construction of claim 3 wherein the conductively-doped source region comprises a dopant gradient in which dopant concentration is lighter in a location relatively deep within the conductively-doped source region as compared to a location relatively shallow within the conductively-doped source region.

7. The semiconductor construction of claim 3 wherein the ferroelectric material comprises one or more of Hf, Zr, Si, O, Y, Ba, Mg and Ti.

8. The semiconductor construction of claim 3 wherein the non-ferroelectric material comprises a thickness within the first and second segments within a range of from about 10 angstroms to about 20 angstroms, and comprises a thickness within the third segment within a range of from about 25 angstroms to about 50 angstroms.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →