IP Library › Granted Patent US 9,885,955
Granted Patent B2
US 9,885,955 · App. 14/992,061 · Granted Feb 6, 2018

Thinner compositions

Inventors: Ahn-Ho Lee (Yongin-si, KR); Seung-Hyun Ahn (Suwon-si, KR); Jin-Seok Yang (Gwangju, KR); Sang-Tae Kim (Iksan-si, KR); Shi-Jin Sung (Seoul, KR); Kyong-Ho Lee (Osan-si, KR)
Assignees: Samsung Electronics Co., Ltd.; Dongwoo Fine-Chem
G03F7/168H01L21/0276H01L21/02087H01L21/31133H01L21/31144H01L21/76802
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Quick Facts
Patent No.
US 9,885,955
App. No.
14/992,061
Granted
Feb 6, 2018
Kind
B2
Abstract

A thinner composition including an acetate-based compound in an amount in a range of about 30 weight percent to about 70 weight percent, a lactate-based compound in an amount in a range of about 1 weight percent to about 20 weight percent, a propionate-based compound in an amount in a range of about 30 weight percent to about 60 weight percent, and an ether-based additive in an amount in a range of about 10 ppm to about 500 ppm, based on a total amount of the composition.

Claims (11)

1. A thinner composition comprising:

an acetate-based compound in an amount in a range of about 30 weight percent to about 70 weight percent;

a lactate-based compound in an amount in a range of about 1 weight percent to about 20 weight percent;

a propionate-based compound in an amount in a range of about 30 weight percent to about 60 weight percent; and

an ether-based surfactant in an amount in a range of about 10 parts per million (ppm) to about 500 ppm, based on a total amount of the composition,

wherein the ether-based surfactant includes at least one of diethylene glycol methyl ethyl ether, ethylene glycol methyl ether, diethylene glycol methyl ether, diethylene glycol ethyl ether, diethylene glycol butyl ether, diethylene glycol dimethyl ether, and diethylene glycol diethyl ether.

2. The thinner composition of claim 1 , wherein the acetate-based compound is in an amount in a range of about 40 weight percent to about 60 weight percent;

the lactate-based compound is in an amount in a range of about 10 weight percent to about 20 weight percent;

the propionate-based compound is in an amount in a range of about 30 weight percent to about 40 weight percent; and

the ether-based surfactant is in an amount in a range of about 10 ppm to about 300 ppm, based on the total amount of the composition.

3. The thinner composition of claim 1 , wherein the acetate-based compound includes propylene glycol alkyl ether acetate, the lactate-based compound includes an alkyl lactate, and the propionate-based compound includes methyl 2-hydroxy-2-methyl propionate (HBM).

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2016
From: LEE, AHN-HO; AHN, SEUNG-HYUN
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 037448/0623 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2016
From: YANG, JIN-SEOK; KIM, SANG-TAE; SUNG, SHI-JIN; LEE, KYONG-HO
To: DONGWOO FINE-CHEM
Reel/Frame 037448/0681 →
Priority Claims (1)
KR 10-2015-0004210 · Jan 12, 2015 · national
Continuity (1)
Related Publication 20160202610A1 · Jul 14, 2016