IP Library Granted Patent US 10,444,431
Granted Patent B2
US 10,444,431 · App. 14/995,853 · Granted Oct 15, 2019

Reticulated resonator, process for making and use of same

Inventors: Raymond W. Simmonds (Boulder, CO); Katarina Cicak (Boulder, CO); Cindy A. Regal (Boulder, CO); Pen-Li Yu (West Lafayette, IN); Yeghishe Tsaturyan (Copenhagen, DK); Thomas P. Purdy (Gaithersburg, MD); Nir S. Kampel (Boulder, CO)
Assignee: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
G02B6/1225B82Y20/00B82Y30/00
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Quick Facts
Patent No.
US 10,444,431
App. No.
14/995,853
Granted
Oct 15, 2019
Kind
B2
Abstract

A reticulated resonator includes: a reticulated substrate that includes: a substrate frame; and a phononic structure in mechanical communication with the substrate frame and including a plurality of unit members arranged in a two-dimensional array; and a membrane disposed on the reticulated substrate. A process for producing a membrane frequency includes: providing a reticulated resonator including: a substrate frame; a phononic structure including: a first link connected to the substrate frame; a plurality of unit members arranged in a two-dimensional array and connected to the first link and in mechanical communication with the substrate frame through the first link; and a second link connected to the unit members; a membrane frame connected to the second link and in mechanical communication with the unit members through the second link; and a membrane disposed on the membrane and in mechanical communication with the substrate frame through the membrane frame and the unit members; subjecting the membrane to an excitation frequency; receiving, by the membrane, the excitation frequency; and producing, by the membrane, a membrane mode including a membrane frequency in response to receiving the excitation frequency.

Claims (53)

1. A reticulated resonator comprising:

a reticulated substrate comprising:

a substrate frame; and

a phononic structure in mechanical communication with the substrate frame and comprising a plurality of unit cells arranged in a two dimensional array such that adjacent unit cells form a membrane frame;

an aperture disposed between adjacent unit cells and bounded by walls of the adjacent unit cells; and

a plurality of reticulation gaps interposed between neighboring unit cells;

a membrane disposed on the membrane frame of the phononic structure and covering the aperture so that the membrane is directly exposed to the aperture; and

a phononic bandgap such that the unit cells of the phononic structure do not communicate phonons between the membrane and the substrate frame and blocks communication of frequencies between the membrane frame and the membrane.

2. The reticulated resonator of claim 1 , further comprising a secondary membrane disposed on the reticulated substrate,

wherein the membrane comprises a first membrane frequency and a first membrane mode, and

the secondary membrane comprises a second membrane frequency and a second membrane mode.

3. The reticulated resonator of claim 1 , wherein the unit cell comprises:

a unit member; and

a link to connect the unit member to the substrate frame.

4. The reticulated resonator of claim 3 , wherein the two-dimensional array of the unit cells is disposed in a periodic arrangement in the phononic structure.

5. The reticulated resonator of claim 4 , wherein the periodic arrangement comprises a square array of unit cells, concentric circular array of unit cells, or a combination comprising at least one of the foregoing.

6. The reticulated resonator of claim 3 , wherein neighboring unit members are spaced apart by a reticulation gap bounded by the link and the unit member.

7. The reticulated resonator of claim 6 , wherein unit cells connect the membrane frame to the substrate frame.

8. The reticulated resonator of claim 7 , wherein links connect the membrane to the substrate frame.

9. The reticulated resonator of claim 1 , wherein the membrane frame and the membrane are centrally disposed among the plurality of unit cells.

10. The reticulated resonator of claim 7 , wherein the membrane and the unit cells comprise a different composition.

11. The reticulated resonator of claim 7 , wherein the membrane comprises a membrane mode that comprises a membrane frequency in a phononic bandgap of the phononic structure.

12. The reticulated resonator of claim 7 , wherein a thickness of the membrane is less than a thickness of the unit member.

13. A reticulated resonator comprising:

a substrate frame;

a phononic structure comprising:

a first link connected to the substrate frame;

a plurality of unit members connected to the substrate frame through the first link and in mechanical communication with the substrate frame through the first link, the unit members arranged in a two-dimensional array; and

a second link connected to the unit member;

a membrane frame connected to the second link and in mechanical communication with the unit members through the second link; and

a plurality of reticulation gaps interposed between neighboring unit cells; and

a membrane disposed on the membrane frame and in mechanical communication with the substrate frame through the membrane frame and the unit members so membrane covers an aperture bounded by walls of the membrane frame so that the membrane is directly exposed to the aperture; and

a phononic bandgap such that the phononic structure does not communicate phonons between the membrane and the substrate frame and blocks communication of frequencies between the membrane frame and the membrane.

14. The reticulated resonator of claim 13 , further comprising a source to produce an excitation frequency,

wherein the membrane receives the excitation frequency from the source.

15. The reticulated resonator of claim 14 , wherein the membrane is configured to produce a membrane mode in response to receiving the excitation frequency, and

the membrane mode comprises a membrane frequency that is in a phononic bandgap of the phononic structure.

16. A process for producing a membrane frequency, the process comprising:

providing a reticulated resonator comprising:

a substrate frame;

a phononic structure comprising:

a first link connected to the substrate frame;

a plurality of unit members connected to the substrate frame through the first link and in mechanical communication with the substrate frame through the first link;

a second link connected to the unit members; and

a plurality of reticulation gaps interposed between neighboring unit cells;

a membrane frame connected to the second link and in mechanical communication with the unit members through the second link;

a membrane disposed on the membrane frame and in mechanical communication with the substrate frame through the membrane frame and the unit members so that membrane covers an aperture bounded by walls of the membrane frame so that the membrane is directly exposed to the aperture; and

a phononic bandgap such that the phononic structure does not communicate phonons between the membrane and the substrate frame and blocks communication of frequencies between the membrane frame and the membrane;

subjecting the membrane to an excitation frequency;

receiving, by the membrane, the excitation frequency;

producing, by the membrane, a membrane mode comprising a membrane frequency in response to receiving the excitation frequency and

blocking, by the phononic structure, communication of frequencies between the membrane frame and the membrane.

17. The reticulated resonator of claim 16 , wherein the membrane frequency is in the phononic bandgap of the phononic structure.

Assignments (1)
CONFIRMATORY LICENSE Recorded Apr 17, 2020
From: UNIVERSITY OF COLORADO
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 052431/0117 →
Continuity (2)
Provisional Application 62103673 · Jan 15, 2015
Related Publication 20160211828A1 · Jul 21, 2016