IP Library Granted Patent US 10,043,905
Granted Patent B2
US 10,043,905 · App. 15/000,519 · Granted Aug 7, 2018

Semiconductor device

Inventors: Kosuke Yanagidaira (Fujisawa, JP); Kazuhide Yoneya (Sagamidhara, JP)
Assignee: TOSHIBA MEMORY CORPORATION
H01L29/7848H01L27/0924H01L29/0653H01L29/0692
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Quick Facts
Patent No.
US 10,043,905
App. No.
15/000,519
Granted
Aug 7, 2018
Kind
B2
Abstract

According to one embodiment, a semiconductor device includes a first element isolating area, a first element area surrounding the first element isolating area, a second element isolating area surrounding the first element area a first gate electrode provided on and across the first element isolating area, the first element area, and the second element isolating area, and a second gate electrode isolated from the first gate electrode and provided on and across the first element isolating area, the first element area, and the second element isolating area.

Claims (40)

1. A semiconductor device comprising:

a first element isolating area;

a first element area surrounding all sides of the first element isolating area, and including first to fourth regions, the first and second regions extending in a first direction, the third and fourth regions extending in a second direction different from the first direction, the first region being connected to one end portion of the third region and one end portion of the fourth region, the second region being connected to the other end portion of the third region and the other end portion of the fourth region;

a second element isolating area surrounding all sides of the first element area;

a first gate electrode provided on and across the first element isolating area, the first region, and the second element isolating area;

a second gate electrode isolated from the first gate electrode and provided on and across the first element isolating area, the second region, and the second element isolating area;

a first gate insulation film provided between the first region and the first gate electrode;

a second gate insulation film provided between the second region and the second gate electrode;

a third element isolating area;

a second element area surrounding all sides of the third element isolating area, all sides of the second element area surrounded by the second element isolating area;

a third gate electrode provided on and across the third element isolating area, the second element area, and the second element isolating area; and

a fourth gate electrode isolated from the third gate electrode and provided on and across the third element isolating area, the second element area, and the second element isolating area, wherein

the first gate electrode and the first element area forms a first transistor,

the second gate electrode and the first element area forms a second transistor, the first element area forms a rectangular annular shape,

the second element area forms a rectangular annular shape,

a transistor of a first conductive-type is formed by the first gate electrode and the first element area, and a transistor of a second conductive-type which is different from the first conductive-type is formed by the third gate electrode and the second element area, and

the first element area and the second element area are different from each other in outer dimension in the first direction.

2. The device of claim 1 , wherein the first gate electrode and the second gate electrode are aligned in a channel width direction.

3. The device of claim 1 , further comprising:

a first channel region provided under the first gate electrode and in the first element area;

a first source/drain region provided in the first element area in a manner sandwiching the first channel region;

a second channel region provided under the third gate electrode and in the second element area; and

a second source/drain region provided in the second element area in a manner sandwiching the second channel region,

wherein a dimension of the first source/drain region is smaller than a dimension of the second source/drain region.

4. The device of claim 1 , wherein the third region and the fourth region are provided symmetrically.

5. The device of claim 1 , wherein

a channel surface of the first and second transistor is set to (100) plane, and

a channel length direction of the first and second transistor is set to <100> direction.

6. The device of claim 1 , wherein

no control gate electrode is provided above the first gate electrode and the second gate electrode.

7. The device of claim 1 , wherein

no control gate electrode is provided above a drain of the first transistor, a source of the first transistor, a drain of the second transistor and a source of the second transistor.

8. The device of claim 1 , wherein

the first direction is a channel length direction of the first and second transistors.

9. The device of claim 8 , wherein

the first element area and the second element area are equal to each other in inner dimension in the first direction.

10. The device of claim 8 , wherein

the first element area and the second element area are different from each other in inner dimension in the first direction.

11. The device of claim 1 , wherein

the first and second element areas have outer and inner dimensions designed to adjust stress from the first and second element isolating areas to the first transistor and stress from the second and third element isolating areas to the second transistor.

Assignments (4)
CHANGE OF NAME Recorded Feb 3, 2020
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 051777/0705 →
MERGER AND CHANGE OF NAME Recorded Jan 31, 2020
From: TOSHIBA MEMORY CORPORATION; K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 051765/0117 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043328/0388 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 19, 2016
From: YANAGIDAIRA, KOSUKE; YONEYA, KAZUHIDE
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 037522/0654 →
Continuity (2)
Provisional Application 62217357 · Sep 11, 2015
Related Publication 20170077303A1 · Mar 16, 2017