Electrowetting display device

1. An electrowetting display device comprising:

a first substrate having a first surface and a second surface opposite the first surface;

a second substrate having a third surface and a fourth surface opposite the third surface, wherein the second surface faces the third surface;

a first electrode on the second surface;

a barrier layer at least partially covering the first electrode on the second surface, wherein the barrier layer comprises a first inorganic layer, a first organic layer, and a second inorganic layer, at least one of the first inorganic layer or the second inorganic layer having a first moisture transmission rate lower than a second moisture transmission rate of the first organic layer;

a second electrode on the third surface;

a barrier wall disposed in a region between the first substrate and the second substrate, wherein the barrier wall at least partly defines a pixel areas corresponding to the first electrode; and

an electrowetting layer disposed in the region between the first substrate and the second substrate, and comprising a first fluid and a second fluid, wherein the first fluid is an electrolyte solution and the second fluid is substantially immiscible with the first fluid.

2. The electrowetting display device of claim 1 , wherein the barrier layer is a first barrier layer, and further comprising:

a second barrier layer which at least partially covers the second electrode on the third surface.

3. The electrowetting display device of claim 2 , wherein the second barrier layer comprises a third inorganic layer or a second organic layer.

4. The electrowetting display device of claim 2 , wherein the second barrier layer comprises a third inorganic layer, a second organic layer, and a fourth inorganic layer.

5. An electrowetting display device comprising:

a substrate having a first surface and a second surface opposite the first surface;

an electrode on the second surface;

a barrier layer on the electrode, wherein the barrier layer comprises a first inorganic layer, a first organic layer on the first inorganic layer, and a second inorganic layer on the first organic layer, at least one of the first inorganic layer or the second inorganic layer having a first moisture transmission rate lower than a second moisture transmission rate of the first organic layer;

a barrier wall disposed on the substrate, wherein the barrier wall at least partially surrounds a pixel region that includes the electrode; and

a fluid layer disposed on the barrier layer.

6. The electrowetting display device of claim 5 , further comprising a hydrophobic layer between the barrier layer and the fluid layer.

7. The electrowetting display device of claim 5 , wherein the barrier layer comprises a second organic layer on the second inorganic layer.

8. The electrowetting display device of claim 5 , wherein the first organic layer has at least one of a red color, a green color or a blue color.

9. The electrowetting display device of claim 5 , wherein the second inorganic layer comprises a silicon oxide, a silicon nitride, or an alumina.

10. The electrowetting display device of claim 5 , wherein the barrier wall is hydrophilic.

11. The electrowetting display device of claim 5 , wherein the barrier layer has a thickness between about 300 nanometers and about 500 nanometers.

12. The electrowetting display device of claim 5 , wherein the substrate is a first substrate, and further comprising a second substrate having a third surface facing the second surface of the first substrate, wherein the fluid layer is between the first substrate and the second substrate.

13. The electrowetting display device of claim 12 , wherein the barrier layer is a first barrier layer, and further comprising a second barrier layer at least partially covering the second substrate.

14. The electrowetting display device of claim 13 , wherein the second barrier layer comprises a third inorganic layer or a second organic layer.

15. The electrowetting display device of claim 13 , wherein the second barrier layer comprises a third inorganic layer, a second organic layer, and a fourth inorganic layer.

16. The electrowetting display device of claim 13 , wherein the second barrier layer comprises a silicon oxide, a silicon nitride, or an alumina.

17. The electrowetting display device of claim 13 , wherein the electrode is a first electrode, and further comprising a second electrode between the second substrate and the second barrier layer.

18. A method of manufacturing an electrowetting display device, the method comprising:

providing a first electrode on a first surface of a first substrate;

providing a barrier layer that at least partially covers the first electrode, wherein the barrier layer comprises a first organic layer, a first inorganic layer, and a second organic layer, the first inorganic layer having a first moisture transmission rate lower than a second moisture transmission rate of at least one of the first organic layer or the second organic layer;

providing a second electrode on a second surface of a second substrate, wherein the first surface faces the second surface; and

providing a fluid layer in a region between the first surface and the second surface.

19. The method of claim 18 , wherein the barrier layer is a first barrier layer, and further comprising providing a second barrier layer that at least partially covers the second electrode.

20. The method of claim 19 , wherein

the providing the second barrier layer comprises a chemical vapor deposition process performed at a first temperature,

the providing the first barrier layer comprises a chemical vapor deposition process performed at a second temperature, the first temperature being higher than the second temperature, and

the second barrier layer has a larger density than the first barrier layer.