IP Library Granted Patent US 10,096,363
Granted Patent B2
US 10,096,363 · App. 15/005,091 · Granted Oct 9, 2018

Methods of forming nanotube films and articles

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Quick Facts
Patent No.
US 10,096,363
App. No.
15/005,091
Granted
Oct 9, 2018
Kind
B2
Abstract

Nanotube films and articles and methods of making the same are disclosed. A conductive article or a substrate comprises at least two unaligned nanotubes extending substantially parallel to the substrate and each contacting end points of the article but each unaligned relative to the other, the nanotubes providing a conductive pathway within a predefined space.

Claims (14)

1. A method of forming a lithographically-dimensioned conductive article of nanotubes, the method comprising:

depositing a fabric of pre-grown, functionalized nanotubes on a substrate having at least a first conductive pad and a second conductive pad;

depositing a photoresist layer on the fabric;

patterning the photoresist layer to form a patterned photoresist layer;

using a lithographic pattern transferred to the patterned photoresist layer to remove a portion of the fabric to form a patterned nanotube fabric extending substantially parallel to the substrate,

wherein each nanotube in the patterned nanotube fabric is in fixed contact with the first conductive pad and each nanotube is in fixed contact with the second conductive pad but each nanotube has an independent orientation relative to the other nanotubes,

wherein the nanotubes form a conductive article substantially parallel to the substrate between the first and second conductive pads, and

wherein the conductive article has at least two sides that are substantially parallel to each other.

2. The method of claim 1 wherein the nanotubes include single-walled nanotubes.

3. The method of claim 1 wherein the nanotubes include multi-walled nanotubes.

4. The method of claim 1 wherein the nanotubes have different lengths.

5. The method of claim 1 wherein the nanotubes are of a controllable density.

6. The method of claim 1 , wherein the patterned nanotube fabric spatially extends to edges of a defined region having selected and controlled dimensions corresponding to the lithographic pattern.

7. The method of claim 1 wherein the patterned nanotube fabric is a multilayer nanotube fabric.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS Recorded Jul 8, 2021
From: SILICON VALLEY BANK
To: NANTERO, INC.
Reel/Frame 056790/0001 →
INTELLECTUAL PROPERTY SECURITY AGREEMENT Recorded Nov 11, 2020
From: NANTERO, INC.
To: SILICON VALLEY BANK
Reel/Frame 054383/0632 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 4, 2016
From: RUECKES, THOMAS; SEGAL, BRENT M.
To: NANTERO INC.
Reel/Frame 037889/0162 →