Bis(trimethylsilyl) six-membered ring systems and related compounds as reducing agents for forming layers on a substrate
A first compound having an atom in an oxidized state is reacted with a bis(trimethylsilyl) six-membered ring system or related compound to form a second compound having the atom in a reduced state relative to the first compound. The atom in an oxidized state is selected from the group consisting of Groups 2-12 of the Periodic Table, the lanthanides, As, Sb, Bi, Te, Si, Ge, Sn, and Al.
1. A compound selected from the group consisting of:
wherein R, R 1 , R 1′ , R 1″ , R 2 , R 3 , R 4 , and R 5 are each independently H, C 1-10 alkyl, C 6-14 aryl, or C 4-14 heteroaryl.
2. The compound of claim 1 having the following formula:
3. The compound of claim 1 having the following formula:
4. The compound of claim 1 having the following formula:
5. The compound of claim 1 having the following formula:
6. The compound of claim 1 having the following formula:
7. The compound of claim 1 having the following formula:
8. The compound of claim 1 having the following formula:
9. The compound of claim 1 having the following formula:
10. A compound having the following formula:
wherein R 1 , R 1′ , R 1″ , R 2 , R 3 , R 4 , R 5 , and R 6 are each independently H, C 1-10 alkyl, C 6-14 aryl, or C 4-14 heteroaryl.
11. A compound selected from the group consisting of:
wherein R, R 1 , R 1′ , R 1″ ,R 2 , R 3 , R 4 , and R 5 are each independently H, C 1-10 alkyl, C 6-14 aryl, or C 4-14 heteroaryl.