Nonvolatile semiconductor memory device
According to one embodiment, a nonvolatile semiconductor memory device includes a plurality of conducting layers, a semiconductor layer, a variable resistive element, and a first wiring. The plurality of conducting layers are laminated in a first direction at predetermined pitches. The conducting layers extend in a second direction. The second direction is along the surface of the substrate. The semiconductor layer extends in the first direction. The variable resistive element is disposed at an intersection point between the plurality of conducting layers and the semiconductor layer. The first wiring is opposed to an inside of the semiconductor layer via a gate insulating film. The first wiring extends in the first direction. The semiconductor layer at least includes a first part and a second part. The first part is upward of the conducting layer on a lowermost layer. The second part is downward of the first part. The first part has a first length in a third direction. The third direction is intersecting the first direction and the second direction, and is along the surface of the substrate. The second part has a second length in the third direction. The second length is shorter than the first length.
1. A nonvolatile semiconductor memory device, comprising:
a plurality of conducting layers laminated in a first direction to a surface of a substrate at predetermined pitches, the plurality of conducting layers extending in a second direction along the surface of the substrate;
a semiconductor layer extending in the first direction;
a variable resistive element disposed at an intersection point between the plurality of conducting layers and the semiconductor layer;
a first wiring opposed to an inside of the semiconductor layer via a gate insulating film, the first wiring extending in the first direction; and
a second wiring extending in the second direction, the second wiring being electrically connected to an upper portion of the first wiring, wherein:
the semiconductor layer at least includes a first part and a second part, the first part of the semiconductor layer being upward of a conducting layer on a lowermost layer of the plurality of the conducting layers, the second part of the semiconductor layer being downward of the first part of the semiconductor layer,
the first part of the semiconductor layer has a first length in a third direction, the third direction being intersecting the first direction and the second direction, and along the surface of the substrate, and
the second part of the semiconductor layer has a second length in the third direction, the second length of the second part of the semiconductor layer being shorter than the first length of the first part of the semiconductor layer.
2. The nonvolatile semiconductor memory device according to claim 1 , wherein
the semiconductor layer has a columnar shape surrounding a peripheral area of the first wiring.
3. The nonvolatile semiconductor memory device according to claim 1 , wherein
the first wiring, the gate insulating film, and the semiconductor layer configure a transistor, the transistor including the first wiring as a gate and the semiconductor layer as a channel.
4. The nonvolatile semiconductor memory device according to claim 1 , wherein:
a plurality of first wirings is disposed along the second direction, the plurality of first wirings extending in the semiconductor layer and the inside of the semiconductor layer, and
the second wiring is electrically connected in common to the plurality of first wirings, the plurality of first wirings being disposed along the second direction.
5. The nonvolatile semiconductor memory device according to claim 4 , wherein
the second length of the second part of the semiconductor layer is greater than a length in the third direction, the length in the third direction being an addition of the first wiring and the gate insulating film.
6. The nonvolatile semiconductor memory device according to claim 1 , further comprising:
a third wiring electrically connected to a lower end of the semiconductor layer, the third wiring extending in the third direction.
7. The nonvolatile semiconductor memory device according to claim 6 , wherein
the third wiring is made of metal, and
a connection between the lower end of the semiconductor layer and the third wiring being an ohmic contact.
8. The nonvolatile semiconductor memory device according to claim 1 , wherein
a conducting layer of the plurality of conducting layers has a comb shape viewed from the first direction.
9. The nonvolatile semiconductor memory device according to claim 1 , wherein
the variable resistive element is disposed across a sidewall of the first part of the semiconductor layer to a sidewall of the second part of the semiconductor layer.
10. The nonvolatile semiconductor memory device according to claim 1 , wherein
a lower end of the variable resistive element extends in the third direction at a bottom portion of the first part of the semiconductor layer.
11. The nonvolatile semiconductor memory device according to claim 1 , wherein
the first wiring contains polysilicon, and the second wiring contains metal.
12. The nonvolatile semiconductor memory device according to claim 11 , wherein
a connection between the first wiring and the second wiring is an ohmic contact.