Semiconductor device
Semiconductor devices are provided. The semiconductor device includes an active fin which extends along a first direction and has a protruding shape, a gate structure which is disposed on the active fin to extend along a second direction intersecting the first direction, and a spacer which is disposed on at least one side of the gate structure, wherein the gate structure includes a first area and a second area which is adjacent to the first area in the second direction, wherein a first width of the first area in the first direction is different from a second width of the second area in the first direction, and the spacer extends continuously along both the first area and the second area.
1. A semiconductor device, comprising:
an active fin extending along a first direction and having a protruding shape;
a field insulating layer covering at least part of the active fin;
a gate structure on the active fin to extend along a second direction intersecting the first direction; and
a spacer on at least one side of the gate structure,
wherein a first area of the gate structure is adjacent to a second area of the gate structure in the second direction,
wherein the first area is only on the field insulating layer and does not extend to the active fin in the second direction, as viewed in a third direction intersecting the first direction and the second direction,
wherein the second area is only on the active fin and does not extend to the field insulating layer in the second direction, the second area being non-overlapping with the first area, as viewed in the third direction, and having a same length as the active fin in the second direction, and
wherein a second width of the second area in the first direction is greater than a first width of the first area in the first direction, and the spacer extends continuously along the first area and the second area.
2. The semiconductor device of claim 1 , wherein the second area and a top surface of the active fin completely overlap each other, and the first area is not on the active fin.
3. The semiconductor device of claim 1 , wherein the spacer has a uniform width in the first direction.
4. The semiconductor device of claim 1 , wherein a width of the spacer on a first side of the gate structure in the first direction is different from a width of another spacer on a second side of the gate structure, the second side of the gate structure being opposite the first side of the gate structure.
5. The semiconductor device of claim 1 , wherein the first width and the second width change continuously along a direction in which the gate structure extends.
6. The semiconductor device of claim 1 , wherein the active fin includes a first active fin and a second active fin which are arranged sequentially and separated in the second direction, and an area between the first active fin and the second active fin is the first area.
7. A semiconductor device, comprising:
an active fin extending along a first direction and having a protruding shape;
a field insulating layer covering at least part of the active fin;
a gate structure on the active fin and the field insulating layer to extend along a second direction; and
spacers on opposite sides of the gate structures,
wherein a first area of the gate structure is adjacent to a second area of the gate structure in the second direction,
wherein the first area is only on the field insulating layer and does not extend to the active fin in the second direction, as viewed in a third direction intersecting the first direction and the second direction,
wherein the second area is only on the active fin and does not extend to the field insulating layer in the second direction, the second area being non-overlapping with the first area, as viewed in the third direction,
wherein the spacers define widths of the first area and the second area, and a first width of the first area is smaller than a second width of the second area, and
wherein center portions of the spacers on sides of the first area have same widths in the first direction as center portions of the spacers on sides of the second area.
8. The semiconductor device of claim 7 , wherein the spacers extend continuously along the first area and the second area.
9. A semiconductor device, comprising:
an active fin extending along a first direction and having a protruding shape;
a field insulating layer covering at least part of the active fin;
a gate structure on the active to extend along a second direction intersecting the first direction; and
a spacer on at least one side of the gate structure,
wherein a first area of the gate structure is adjacent to a second area of the gate structure in the second direction,
wherein the first area is only on the field insulating layer and does not extend to the active fin in the second direction, as viewed in a third direction intersecting the first direction and the second direction, and
wherein the second area is only on the active fin and does not extend to the field insulating layer in the second direction, the second area being non-overlapping with the first area, as viewed in the third direction, and having a same length as the active fin in the second direction,
wherein a first width of the first area in the first direction is different from a second width of the second area in the first direction, and the spacer extends continuously along the first area and the second area.
10. The semiconductor device of claim 9 , wherein the first width and the second width are constant along a direction in which the gate structure extends, and the gate structure includes different materials in each of the first and second areas.
11. The semiconductor device of claim 10 , wherein one of sidewalls of the gate structure is flat over the first area and the second area.
12. The semiconductor device of claim 9 , wherein the first width and the second width change continuously along a direction in which the gate structure extends.
13. The semiconductor device of claim 9 , wherein the first area of the gate structure is in contact with the second area of the gate structure.
14. The semiconductor device of claim 1 , wherein an entire bottom surface of the second area contacts a top surface of the active fin.
15. The semiconductor device of claim 1 , wherein the first width of the first area in the first direction is smaller than the second width of the second area in the first direction over an entire region of the first area.
16. The semiconductor device of claim 7 , wherein the second area and a top surface of the active fin completely overlap each other, and the first area is not on the active fin.
17. The semiconductor device of claim 7 , wherein the first width of the first area in the first direction is smaller than the second width of the second area in the first direction over an entire region of the first area.
18. The semiconductor device of claim 7 , wherein the center portions of the spacers on the sides of the first area is separated from a boundary between the first area and the second area, and
wherein the center portions of the spacers on the sides of the second area is separated from a boundary between the first area and the second area.
19. The semiconductor device of claim 9 , wherein the second width of the second area in the first direction is greater than the first width of the first area in the first direction.
20. The semiconductor device of claim 10 , wherein the first width of the first area in the first direction is smaller than the second width of the second area in the first direction over an entire region of the first area.