Method for achieving good adhesion between dielectric and organic material
The present invention generally relates to a method for forming a MEMS device and a MEMS device formed by the method. When forming the MEMS device, sacrificial material is deposited around the switching element within the cavity body. The sacrificial material is eventually removed to free the switching element in the cavity. The switching element has a thin dielectric layer thereover to prevent etchant interaction with the conductive material of the switching element. During fabrication, the dielectric layer is deposited over the sacrificial material. To ensure good adhesion between the dielectric layer and the sacrificial material, a silicon rich silicon oxide layer is deposited onto the sacrificial material before depositing the dielectric layer thereon.
1. A method of forming a MEMS device, comprising:
depositing an organic based sacrificial layer over an electrode;
depositing a silicon rich layer comprises silicon oxide over the organic based sacrificial layer, wherein the silicon rich layer has an amount of silicon greater than a stoichiometric silicon layer;
depositing a dielectric layer over the silicon rich layer, wherein a ratio of silicon containing gas to oxygen containing gas is higher when depositing the silicon rich layer as compared to depositing the dielectric layer;
forming a movable plate over the dielectric layer; and
removing the sacrificial layer.
2. The method of claim 1 , wherein the silicon rich silicon is deposited by PECVD.
3. The method of claim 2 , wherein depositing the silicon rich layer comprises introducing silane and an oxygen containing gas into the processing chamber.
4. The method of claim 3 , wherein the dielectric layer comprises silicon oxide and wherein the dielectric layer is deposited by PECVD.
5. The method of claim 1 , wherein the oxygen containing gas comprises N 2 O.
6. The method of claim 5 , further comprising introducing N 2 during depositing the silicon rich layer.
7. The method of claim 6 , wherein the silicon rich layer comprises multiple layers.
8. The method of claim 7 , wherein the silicon rich layer has a thickness of about 1 nm to about 3 nm.