CONTROL METHOD FOR THE ACCERLATION OF A VACUUM PUMP, IN WHICH METHOD THE INPUT CURRENT OF THE CONTROL DEVICE IS LIMITED
A control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device in which, in a first acceleration phase, the input current of the control device increases up to a maximum value Is,max and, in a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.
1 . Control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device, in which
in a first acceleration phase, the input current of the control device increases up to a maximum value I s,max and
in a second acceleration phase, the control device is operated at the maximum value I s,max of the input current.
2 . Control method of claim 1 , wherein the rated speed n max of the vacuum pump is reached at the end of the second acceleration phase.
3 . Control method of claim 2 , wherein the input current of the control device decreases to an operating value after the second acceleration phase.
4 . Control method of one of claims 1 to 3 , wherein, in the first acceleration phase, the input current of the control device increases, in particular in a constant manner, to the maximum value I s,max .
5 . Control method of claim 4 , wherein the input current of the control device reaches the maximum value I s,max at the end of the first acceleration phase.
6 . Control method of one of claims 1 to 5 , wherein the motor current is constant during the first acceleration phase, the motor current in particular having a constant maximum value I s,max .
7 . Control method of one of claims 1 to 6 , wherein the motor current decreases during the second acceleration phase.
8 . Control method of one of claims 1 to 7 , wherein the motor current decreases to an operating value after the second acceleration phase.
9 . Control method of one of claims 1 to 8 , wherein the rotational speed of the vacuum pump increases in the first acceleration phase and in the second acceleration phase.
10 . Control method of claim 9 , wherein the rotational speed of the vacuum pump increases faster in the first acceleration phase than in the second acceleration phase.