Apparatuses including memory arrays with source contacts adjacent edges of sources
View Patent ↗Various apparatuses, including three-dimensional (3D) memory devices and systems including the same, are described herein. In one embodiment, a 3D memory device can include at least two sources; at least two memory arrays respectively formed over and coupled to the at least two sources; and a source conductor electrically respectively coupled to the at least two sources using source contacts adjacent one or more edges of the source. Each of the at least two memory arrays can include memory cells, control gates, and data lines. There is no data line between an edge of a source and the source contacts adjacent the edge.
1. An apparatus, comprising:
multiple source plates comprising at least a first source plate and a second source plate, the first source plate coupled to a first memory array, and the second source plate coupled to a second memory array;
a source conductor extending in a first direction, the source conductor coupled to the first source plate through multiple first source contacts adjacent to each edge of a first pair of opposing edges of the first source plate, and coupled to the second source plate through multiple second source contacts adjacent to each edge of a second pair of opposing edges of the second source plate, wherein the first pair of opposing edges and the second pair of opposing edges extend in a second direction perpendicular to the first direction; and
a plurality of bit lines extending in the second direction,
wherein along the first direction, a first edge of the first pair of opposing edges of the first source plate is closer to a respective first source contact of the multiple first source contacts than any bit line, the respective first source contact located between the first pair of opposing edges and adjacent to the first edge of the first pair of opposing edges.
2. The apparatus of claim 1 , wherein at least one of the first and second memory arrays includes vertical strings of memory cells, and control gates.
3. The apparatus of claim 1 , wherein each source contact of the multiple first source contacts includes a third contact electrically coupled to the source conductor, a fourth contact electrically coupled to the first source plate of the multiple source plates, and a conductive connector connecting the third contact and the fourth contact, and
wherein each source contact of the multiple second source contacts includes a fifth contact electrically coupled to the source conductor, a sixth contact electrically coupled to the second source plate of the multiple source plates, and a conductive connector connecting the fifth contact and the sixth contact.
4. The apparatus of claim 1 , wherein the first and second source plates each comprise metal material.
5. The apparatus of claim 1 , wherein the first and second source plates each comprise WSi material.
6. The apparatus of claim 1 , wherein the first and second source plates each comprise a stack of metal material and polysilicon.
7. The apparatus of claim 1 , wherein the first and second source plates each comprise a stack of WSi material and polysilicon.
8. The apparatus of claim 1 , wherein along the first direction, a first edge of the second pair of opposing edges of the second source plate is closer to a respective second source contact of the multiple second source contacts than any bit line, and wherein the respective second source contact located between the second pair of opposing edges and adjacent to the first edge of the second pair of opposing edges.
9. A method of making an apparatus, comprising:
forming source plates comprising at least a first source plate and a second source plate;
forming a first memory array over and coupled to the first source plate, and forming a second memory array over and coupled to the second source plate;
forming a source conductor over the first memory array and the second memory array and extending in a first direction;
forming multiple bit lines extending in a second direction perpendicular to the first direction; and
forming multiple first source contacts adjacent to a first pair of opposing edges of the first source plate to couple the source conductor and the first source plate, the first pair of opposing edges of the first source plate extending in the second direction, wherein along the first direction, a first edge of the first pair of opposing edges is closer to a respective first source contact of the multiple first source contacts than any bit line, and wherein the respective first source contact is located between the first pair of opposing edges and adjacent to the first edge of the first pair of opposing edges.
10. The method of claim 9 , further comprising forming multiple second source contacts adjacent to a second pair of opposing edges of the second source plate to couple the source conductor and the second source plate, the second pair of opposing edges extending in the second direction, wherein along the first direction, a first edge of the second pair of opposing edges is closer to a respective second source contact of the multiple second source contacts than any bit line, the respective second source contact located between the second pair of opposing edges and adjacent to the first edge of the second pair of opposing edges.