Fabrication of higher-k dielectrics
A method of manufacturing a semiconductor structure, and the resultant structure. The method includes forming an oxide layer above a substrate. The method includes forming a metal layer above the oxide layer. The method includes forming a first capping layer above the metal layer. A material forming the first capping layer may be titanium oxide, or titanium oxynitride. The method includes annealing the semiconductor structure. Annealing the semiconductor structure may result in diffusing a metal from the metal layer into the oxide layer.
1. A method of manufacturing a semiconductor structure, the method comprising:
forming an oxide layer above a substrate;
forming a metal layer above the oxide layer;
forming a first capping layer above the metal layer, wherein a material forming the first capping layer comprises one or more of titanium oxide, and titanium oxynitride; and
annealing the semiconductor structure, wherein annealing the semiconductor structure comprises diffusing a metal from the metal layer into the oxide layer and the material from the capping layer into the oxide layer, and wherein the metal from the metal layer is uniformly distributed throughout the oxide layer and the material from the capping layer is located in a top portion of the oxide layer, and wherein the material in the top portion of the oxide layer exists having a gradient with the highest concentration on the top surface of the oxide layer.