Manufacturing method of semiconductor device
A manufacturing method of a semiconductor device is provided by forming a trench in a surface of a SiC substrate, positioning a protective substrate to cover the trench, and annealing the SiC substrate and the protective substrate.
1. A manufacturing method of a semiconductor device, the method comprising:
forming a trench in a surface of a SiC substrate;
positioning a protective substrate to cover the trench; and
annealing the SiC substrate and the protective substrate in a heating furnace,
in the annealing of the SiC substrate and the protective substrate the annealing is performed such that an atmospheric pressure inside the trench becomes higher than an atmospheric pressure outside the trench in the heating furnace.
2. The manufacturing method according to claim 1 , wherein
a melting point of the protective substrate is equal to or higher than 2000 degrees Celsius, and
in the annealing of the SiC substrate and the protective substrate, the SiC substrate is annealed at a temperature equal to or higher than 1700 degrees Celsius.
3. The manufacturing method according to claim 1 , the method further comprising:
forming a protective film on the surface of the SiC substrate after the forming of the trench; and
removing the protective film after the annealing of the SiC substrate and the protective substrate,
wherein
in the positioning of the protective substrate, the protective substrate is positioned on the surface side of the SiC substrate on which the protective film has been formed.
4. The manufacturing method according to claim 1 , the method further comprising:
introducing impurities to the SiC substrate before the annealing of the SiC substrate and the protective substrate.
5. The manufacturing method according to claim 1 , wherein
in the positioning of the protective substrate, the SiC substrate is mounted on the protective substrate.
6. The manufacturing method according to claim 1 , wherein
the protective substrate consists of Carbon or a compound including Carbon.
7. The manufacturing method according to claim 1 , further comprising:
carrying the SiC substrate with the protective substrate into the heating furnace before annealing the SiC substrate and the protective substrate such that the protective substrate is used as a carrying plate for carrying the SiC substrate.
8. The manufacturing method according to claim 1 , wherein in the positioning of the protective substrate the protective substrate is directly positioned onto the surface of the SiC substrate.