Well and punch through stopper formation using conformal doping
View Patent ↗A method for doping fins includes depositing a first dopant layer at a base of fins formed in a substrate, depositing a dielectric layer on the first dopant layer and etching the dielectric layer and the first dopant layer in a first region to expose the substrate and the fins. A second dopant layer is conformally deposited over the fins and the substrate in the first region. The second dopant layer is recessed to a height on the fins in the first region. An anneal is performed to drive dopants into the fins from the first dopant layer in a second region and from the second dopant layer in the first region to concurrently form punch through stoppers in the fins and wells in the substrate.
1. A method for doping fins, comprising:
depositing a first dopant layer at a base of fins formed in a substrate;
depositing a dielectric layer on the first dopant layer;
etching the dielectric layer and the first dopant layer in a first region to expose the substrate and the fins;
conformally depositing a second dopant layer over the fins and the substrate in the first region;
recessing the second dopant layer to a height on the fins in the first region; and
annealing to drive dopants into the fins from the first dopant layer in a second region and from the second dopant layer in the first region to concurrently form punch through stoppers in the fins and wells in the substrate.
2. The method as recited in claim 1 , wherein depositing the first dopant layer at the base of fins includes:
depositing a doped silicate glass; and
recessing the doped silicate glass to a thickness on the fins associated with the punch through stoppers.
3. The method as recited in claim 1 , wherein conformally depositing the second dopant layer includes:
depositing a doped silicate glass; and
conformally forming a cap layer over the doped silicate glass.
4. The method as recited in claim 1 , wherein recessing the second dopant layer to the height includes:
depositing an organic dielectric layer on the fins; and
recessing the organic dielectric layer to the height to etch the second dopant layer to the height.
5. The method as recited in claim 1 , wherein the first region includes one of an n-type field effect transistor (NFET) region or a p-type field effect transistor (PFET) region and the second region includes the other of the NFET region or the PFET region.
6. The method as recited in claim 1 , wherein the first dopant layer and the second dopant layer include different dopant conductivity types.
7. The method as recited in claim 1 , further comprising forming a field dielectric over the first and second dopant layers.
8. The method as recited in claim 7 , wherein the field dielectric is formed from the base of the fins to a top of the punch through stoppers.
9. A method for doping fins, comprising:
etching fins in a substrate;
depositing a first dopant layer at a base of the fins;
depositing a dielectric layer on the first dopant layer;
etching the dielectric layer and the first dopant layer in a first region to expose the substrate and the fins;
conformally depositing a second dopant layer over the fins and the substrate in the first region;
conformally forming a cap layer over the second dopant layer;
forming and recessing an organic dielectric layer down to a height on the fins in the first region;
recessing the cap layer and second dopant layer to the height; and
annealing to drive dopants into the fins from the first dopant layer in a second region and from the second dopant layer in the first region to concurrently form punch through stoppers in the fins and wells in the substrate.
10. The method as recited in claim 9 , wherein depositing the first dopant layer at the base of fins includes:
depositing a doped silicate glass; and
recessing the doped silicate glass to a thickness on the fins associated with the punch through stoppers.
11. The method as recited in claim 9 , wherein conformally depositing the second dopant layer includes depositing a doped silicate glass.
12. The method as recited in claim 9 , wherein the organic dielectric layer is spun on.
13. The method as recited in claim 9 , wherein the first region includes one of an n-type field effect transistor (NFET) region or a p-type field effect transistor (PFET) region and the second region includes the other of the NFET region or the PFET region.
14. The method as recited in claim 9 , wherein the first dopant layer and the second dopant layer include different dopant conductivity types.
15. The method as recited in claim 9 , further comprising forming a field dielectric over the first and second dopant layers.
16. The method as recited in claim 15 , wherein the field dielectric is formed from the base of the fins to a top of the punch through stoppers.