Programmable integrated circuits and methods of forming the same
Integrated circuits and methods of forming the same are provided. An exemplary integrated circuit includes a semiconductor substrate having a central shallow trench isolation (STI) region. A pair of select transistors have drain regions in contact with opposite portions of the central STI region. A central gate structure overlies the central STI region and includes a central gate dielectric layer. The central gate dielectric layer has a medial dielectric region overlying the central STI region, a first lateral dielectric region overlying the first drain region, and a second lateral dielectric region overlying the second drain region. The first lateral dielectric region defines a first programmable element and the second lateral dielectric region defines a second programmable element.
1. An integrated circuit comprising:
a semiconductor substrate having a central shallow trench isolation (STI) region; and
a unit cell including:
a first select transistor having a first select gate structure, a first source region, and a first drain region in contact with a first portion of the central STI region;
a second select transistor having a second select gate structure, a second source region, and a second drain region in contact with a second portion of the central STI region, wherein the first drain region is opposite of the second drain region relative to the central STI region; and
a central gate structure overlying the central STI region and including a central gate dielectric layer having:
a medial dielectric region overlying the central STI region between the first drain region and the second drain region;
a first lateral dielectric region overlying the first drain region; and
a second lateral dielectric region overlying the second drain region;
wherein the first lateral dielectric region defines a first programmable element and the second lateral dielectric region defines a second programmable element.
2. The integrated circuit of claim 1 , wherein a top surface of the central STI region is disposed on a recessed plane relative to a top surface of the first and second drain regions of the semiconductor substrate.
3. The integrated circuit of claim 1 , wherein the first lateral dielectric region has a first stepped portion extending from the medial dielectric region and overlying the first drain region, and wherein the second lateral dielectric region has a second stepped portion extending from the medial dielectric region and overlying the second drain region.
4. The integrated circuit of claim 3 , wherein the first stepped portion extends from a top surface of the central STI region to a top surface of the first drain region, and wherein the second stepped portion extends from the top surface of the central STI region to a top surface of the second drain region.
5. The integrated circuit of claim 1 , further comprising a first lateral STI region formed in and on the semiconductor substrate on a first source side of the first select transistor and a second lateral STI region formed in and on the semiconductor substrate on a second source side of the second select transistor.
6. The integrated circuit of claim 1 , wherein the first select transistor is formed in and on a first region of the semiconductor substrate having a first dopant profile and the second select transistor is formed in and on a second region of the semiconductor substrate having a second dopant profile, wherein the first and second dopant profiles comprise the same low-voltage dopant profile.
7. The integrated circuit of claim 6 , wherein the source and drain regions comprise doped source and drain regions having n-type conductivity-determining ions, and wherein the first and second regions of the semiconductor substrate comprise first and second doped regions having p-type conductivity-determining ions.
8. The integrated circuit of claim 6 , wherein the central STI region is disposed between the first and second regions of the semiconductor substrate.
9. The integrated circuit of claim 1 , wherein the first select gate structure comprises a first select gate and a first select dielectric layer, and wherein the second select gate structure comprises a second select gate and a second select dielectric layer.
10. The integrated circuit of claim 9 , wherein the unit cell further comprises a first select gate wordline contact disposed in electrical communication with the first select gate.
11. The integrated circuit of claim 9 , wherein the unit cell further comprises a second select gate wordline contact disposed in electrical communication with the second select gate.
12. The integrated circuit of claim 9 , wherein each of the first select dielectric layer, the second select dielectric layer, and the central gate dielectric layer comprises a high k dielectric layer.
13. The integrated circuit of claim 1 , wherein the central gate structure is further disposed directly over the first and second drain regions with the first and second dielectric regions sandwiched between a central gate and the first and second drain regions, respectfully.
14. A method of forming an integrated circuit, the method comprising:
providing a semiconductor substrate having a first semiconductor fin and a second semiconductor fin;
forming a recessed central shallow trench isolation (STI) region between the first and second semiconductor fins;
forming a first select transistor overlying a top surface of the first semiconductor fin, the first select transistor having a first select gate structure, a first source region, and a first drain region in contact with a first portion of the recessed central STI region;
forming a second select transistor overlying a top surface of the second semiconductor fin, the second select transistor having a second select gate structure, a second source region, and a second drain region in contact with a second portion of the recessed central STI region, the second drain region is opposite of the first drain region relative to the central STI region; and
forming a central gate structure overlying the recessed central STI region including a central gate dielectric layer having:
a medial dielectric region overlying the central STI region between the first drain region and the second drain region;
a first lateral dielectric region overlying the first drain region; and
a second lateral dielectric region overlying the second drain region;
wherein the first lateral dielectric region defines a first programmable element and the second lateral dielectric region defines a second programmable element.
15. The method of claim 14 , wherein the central gate structure is further formed overlying the drain regions.
16. The method of claim 14 , wherein a dielectric layer of the first select transistor, the second select transistor, and the central gate structure are all concurrently formed.
17. The method of claim 16 , wherein the dielectric layer comprises a high k dielectric layer.
18. An integrated circuit comprising:
a semiconductor substrate having a first semiconductor fin and a second semiconductor fin with a recessed central shallow trench isolation (STI) region disposed there between;
a unit cell including:
a first select transistor overlying the first semiconductor fin, the first select transistor having a first select gate structure, a first source region, and a first drain region in contact with a first side of the recessed central STI region;
a second select transistor overlying the second semiconductor fin, the second select transistor having a second select gate structure, a second source region, and a second drain region in contact with a second side of the recessed central STI region opposite the first side; and
a central gate structure overlying the recessed central STI region having a central dielectric layer, the central dielectric layer having a medial dielectric region formed on the recessed central STI region between the first drain region and the second drain region, a first lateral dielectric region in contact with the first drain region, and a second lateral dielectric region in contact with the second drain region;
wherein the first lateral dielectric region defines a first programmable element and the second dielectric lateral region defines a second programmable element.
19. The integrated circuit of claim 18 , wherein a top surface of the recessed central STI region is recessed relative to a top surface of the first and second semiconductor fins, wherein the first lateral dielectric region has a first stepped portion overlying the first drain region, and wherein the second lateral dielectric region has a second stepped portion overlying the second drain region.
20. The integrated circuit of claim 19 , wherein the first stepped portion extends from a top surface of the recessed central STI region to a top surface of the first drain region, and wherein the second stepped portion extends from the top surface of the recessed central STI region to a top surface of the second drain region.