IP Library Granted Patent US 9,885,648
Granted Patent B2
US 9,885,648 · App. 15/064,713 · Granted Feb 6, 2018

Particle detecting apparatus

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Quick Facts
Patent No.
US 9,885,648
App. No.
15/064,713
Granted
Feb 6, 2018
Kind
B2
Abstract

A particle detecting apparatus has a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion, a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit, a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known, and a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has a predetermined value.

Claims (28)

1. A particle detecting apparatus, comprising:

a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion;

a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit;

a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known; and

a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has reached a predetermined value, wherein

when it is determined by the first determinator that the concentration of the test particles has reached the predetermined value, the condensing and growing unit imports in and transports the gas to be measured from the inflow port to the outflow port, and

when it is determined by the first determinator that the concentration of the test particles has reached the predetermined value, the particle detector starts detecting the concentration of the particles in the gas to be measured discharged from the outflow port.

2. The particle detector according to claim 1 , further comprising:

a second determinator to determine whether a temperature of the condensing and growing unit reaches a predetermined temperature,

wherein the particle feeder feeds the test particles to the inflow port of the condensing and growing unit when the second determinator determines that the temperature of the condensing and growing unit has reached the predetermined temperature.

3. A particle detecting apparatus, comprising:

a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion;

a particle detector to detect a concentration of the particles discharged from an outflow port of the condensing and growing unit;

an atmosphere detector to detect at least one of a pressure and humidity of the gas discharged from the outflow port of the condensing and growing unit; and

a first determinator to determine whether a detection value detected by the atmosphere detector has reached a predetermined threshold value, wherein

the particle detector detects a concentration of the particles in the gas discharged from the outflow port when it is determined that the detection value detected by the atmosphere detector has reached the threshold value.

4. The particle detecting apparatus according to claim 3 , further comprising:

a second determinator to determine whether a temperature of the condensing and growing unit has reached a predetermined temperature,

wherein the atmosphere detector detects at least one of a pressure and humidity of the gas discharged from the outflow port of the condensing and growing unit when the second determinator determines that the temperature of the condensing and growing unit has reached the predetermined temperature.

5. The particle detecting apparatus according to claim 4 , further comprising:

a particle feeder to feed, to an inflow port of the condensing and growing unit, test particles whose particle diameter and the number of particles per unit volume are known when the first determinator determines that a detection value detected by the atmosphere detector has reached the threshold value; and

a third determinator to determine whether a concentration of the test particles detected by the particle detector has reached a predetermined value, wherein

the condensing and growing unit imports a gas to be measured from the inflow port and transports the gas to the outflow port when it is determined that the detection value detected by the atmosphere detector has reached the threshold value and the concentration of the test particles has the predetermined value, and

the particle detector detects the concentration of the particles in the gas to be measured discharged from the outflow port when it is determined that the detection value detected by the atmosphere detector has reached the threshold value and the concentration of the test particles has the predetermined value.

6. The particle detector according to claim 1 , wherein

the test particles are made of sodium chloride, oleic acid, or polystyrene latex.

7. The particle detector according to claim 5 , wherein

the test particles are made of sodium chloride, oleic acid, or polystyrene latex.

Assignments (6)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2017
From: HIRANO, MASAKI; KURODA, YUICHI; OTSUKA, KENICHI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 043786/0220 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE POSTAL CODE PREVIOUSLY RECORDED ON REEL 043027 FRAME 0072. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Sep 1, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043747/0273 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 28, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043027/0072 →