IP Library Granted Patent US 10,553,416
Granted Patent B2
US 10,553,416 · App. 15/066,749 · Granted Feb 4, 2020

Mass spectrometer performing mass spectrometry for sample with laser irradiation

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,553,416
App. No.
15/066,749
Granted
Feb 4, 2020
Kind
B2
Abstract

A mass spectrometer includes a beam radiator radiating a beam to a sample. A laser radiator radiates laser light onto an irradiation surface of a surface of the sample irradiated with the beam or above the irradiation surface. The laser radiator splits the laser light into at least first light and second light. The laser radiator adjusts a polarization state, a length of an optical path, or a direction of the optical path of at least either the first light or the second light to condense the first light and the second light onto the irradiation surface or above the irradiation surface. A detector detects particles discharged from the sample.

Claims (25)

1. A mass spectrometer comprising:

a beam radiator radiating a beam to a sample;

a laser radiator radiating laser light onto an irradiation surface of a surface of the sample irradiated with the beam or above the irradiation surface, the laser radiator splitting the laser light into at least first light and second light and adjusting a polarization state, a length of an optical path, or a direction of the optical path of at least either the first light or the second light to condense the first light and the second light onto the irradiation surface or above the irradiation surface; and

a detector detecting particles discharged from the sample, wherein:

the laser radiator is capable of switching a difference between a length of an optical path of the first light and that of the second light being condensed by a condenser lens on a same position as the first light, between a value smaller than a coherence length and a value equal to or larger than the coherence length,

at least a part of the first light in the first condition and at least a part of the second light in the first condition are condensed to a same position,

the first light in the first condition and the first light in the second condition are condensed to a same position, and

the second light in the first condition and the second light in the second condition are condensed to a same position.

2. The mass spectrometer of claim 1 , wherein

the laser radiator includes

a splitter splitting the laser light into the first light and the second light,

a changer provided in the optical path of the first light or the second light to be capable of changing the polarization state, the length of the optical path, or the direction of the optical path of the at least either the first light or the second light, and

the condenser lens condensing one of the first light and the second light and the other of the first light and the second light having passed through the changer onto the irradiation surface or above the irradiation surface.

3. The mass spectrometer of claim 2 , wherein the changer is a birefringence modulator.

4. The mass spectrometer of claim 2 , wherein the laser radiator includes optical-path adjusting mirrors lengthening the optical path of the first light or the second light.

5. The mass spectrometer of claim 2 , wherein the changer is an acoustic cell.

6. The mass spectrometer of claim 2 , wherein

the splitter is a half mirror.

7. The mass spectrometer of claim 3 , wherein

the splitter is a half mirror.

8. The mass spectrometer of claim 1 , further comprising a particle controller directing particles to the detector, the particles being discharged from the sample by the beam and being ionized by the laser light.

9. The mass spectrometer of claim 2 , further comprising a particle controller directing particles to the detector, the particles being discharged from the sample by the beam and being ionized by the laser light.

10. The mass spectrometer of claim 3 , further comprising a particle controller directing particles to the detector, the particles being discharged from the sample by the beam and being ionized by the laser light.

11. The mass spectrometer of claim 1 , wherein the laser light is infrared laser light.

12. The mass spectrometer of claim 1 , wherein the laser radiator is capable of switching a difference between a polarization direction of the first light and that of the second light, between a first condition and a second condition, the second condition being different from the first condition in the difference of the polarization direction.

Assignments (6)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE POSTAL CODE PREVIOUSLY RECORDED ON REEL 043027 FRAME 0072. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Sep 1, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043747/0273 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 28, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043027/0072 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 30, 2017
From: AKUTSU, HARUKO; YORISAKI, TOMA
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 041124/0463 →