Method for manufacturing imprinting template substrate, imprinting template substrate, imprinting template, and method for manufacturing semiconductor apparatus
A method for manufacturing an imprinting template substrate forms a protruded mesa portion by removing a part of the substrate, and forms a film containing silicon, carbon, and fluorine, on a side surface of the mesa portion. Even when the template is pressed to the resist, the resist barely adheres to the side surface of the template. Therefore, no defect that the resist having adhered to the side surface of the template falls on the wafer and then defective parts increase, occurs.
1. An imprinting template substrate comprising:
a quartz glass substrate having a protruded mesa portion;
a silicon layer which comprises a material containing polysilicon or amorphous silicon, on a side surface of the mesa portion, the material being different from a material of the quartz glass substrate; and
a film containing silicon, carbon, and fluorine on the silicon layer.
2. The template substrate according to claim 1 ,
wherein the film comprises a film in which silicon, carbon, and fluorine are bonded together.
3. The template substrate according to claim 1 ,
wherein the film is an SiCFn film, where n is 1, 2, or 3.
4. The template substrate according to claim 1 , further comprising:
a first surface coupled to the side surface of the mesa portion, and disposed in a direction substantially parallel to an upper surface of the mesa portion; and
a second surface coupled to the first surface, and disposed in a direction intersecting with the first surface,
wherein the film is disposed on the side surface of the mesa portion and on the second surface, and
a material of the quartz glass substrate is exposed on the first surface.
5. An imprinting template comprising:
a quartz glass substrate having a protruded mesa portion;
a silicon layer which comprises a material containing polysilicon or amorphous silicon, on a side surface of the mesa portion, the material being different from a material of the quartz glass substrate;
a film containing silicon, carbon, and fluorine on the silicon layer; and
a pattern on an upper surface of the protruded mesa portion.
6. The template according to claim 5 ,
wherein the film comprises a film in which silicon, carbon, and fluorine are bonded together.
7. The template according to claim 5 ,
wherein the film is an SiCFn film, where n is 1, 2, or 3.
8. The template according to claim 5 , further comprising:
a first surface coupled to the side surface of the mesa portion, and disposed in a direction substantially parallel to an upper surface of the mesa portion; and
a second surface coupled to the first surface, and disposed in a direction intersecting with the first surface,
wherein the film containing silicon, carbon, and fluorine is disposed on the side surface of the mesa portion and on the second surface, and
a material of the quartz glass substrate is exposed on the first surface.