Semiconductor structure with inhomogeneous regions
A semiconductor layer including a plurality of inhomogeneous regions is provided. Each inhomogeneous region has one or more attributes that differ from a material forming the semiconductor layer. The inhomogeneous regions can include one or more regions configured based on radiation having a target wavelength. These regions can include transparent and/or reflective regions. The inhomogeneous regions also can include one or more regions having a higher conductivity than a conductivity of the radiation-based regions, e.g., at least ten percent higher.
1. A semiconductor heterostructure, comprising:
a group III nitride semiconductor layer including a plurality of inhomogeneous regions, each inhomogeneous region having a set of attributes differing from a group III nitride material forming the semiconductor layer, wherein the plurality of inhomogeneous regions include a combination of a conductive region and at least one of: a transparent region or a reflective region, wherein each of the plurality of inhomogeneous regions occupies at least five percent of at least one of: a lateral planar area of the semiconductor layer or a volume of the semiconductor layer.
2. The semiconductor heterostructure of claim 1 , wherein the conductive region is anisotropic.
3. The semiconductor heterostructure of claim 1 , wherein the group III nitride semiconductor layer comprises a semiconductor structure having a vertical conductive region formed on a background base semiconductor structure including a superlattice having Al x In y Ga 1-x-y N/Al x′ In y′ Ga 1-x′-y′ N sublayers with enhanced horizontal conductivity, wherein a plurality of transparent regions and a plurality of reflective regions are interspersed in the vertical conductive region and the background base semiconductor structure.
4. The semiconductor heterostructure of claim 3 , wherein any lateral cross section of the semiconductor structure contains at least one transparent or reflective region and at least one vertically conductive region.
5. The semiconductor heterostructure of claim 3 , wherein one of the plurality of transparent regions and one of the plurality of reflective regions are laterally adjacent to the vertical conductive region.
6. The semiconductor heterostructure of claim 3 , wherein the superlattice having Al x In y Ga 1-x-y N/Al x′ In y′ Ga 1-x′-y′ N sublayers with enhanced horizontal conductivity forms a two dimensional electron gas (2DEG) and a two dimensional hole gas (2DHG).
7. The semiconductor heterostructure of claim 1 , wherein the group III nitride semiconductor layer comprises a semiconductor structure having a plurality of vertically and horizontally conductive regions arranged to form an interconnected network of conductive paths.
8. An optoelectronic device, comprising:
an active region;
a p-type contact layer located on a first side of the active region; and
a n-type contact layer located on a second side of the active region, wherein at least one of the contact layers comprises a group III nitride semiconductor layer including a plurality of inhomogeneous regions, each inhomogeneous region having a set of attributes differing from a group III nitride material forming the semiconductor layer, wherein the plurality of inhomogeneous regions include:
a set of first inhomogeneous regions configured based on radiation having a target wavelength, wherein each inhomogeneous region in the set of first inhomogeneous regions is at least one of: transparent to the radiation or reflective of the radiation; and
a set of second inhomogeneous regions having a conductivity at least ten percent higher than a conductivity of the at least one of the contact layers.
9. The optoelectronic device of claim 8 , wherein the target wavelength of the radiation ranges between approximately 260 nanometers and approximately 360 nanometers.
10. The optoelectronic device of claim 8 , further comprising a buffer layer having AlN, wherein the n-type contact layer is grown over the buffer layer.
11. The optoelectronic device of claim 8 , further comprising:
a p-type metallic contact adjacent to at least a portion of the p-type contact layer; and
a n-type metallic contact adjacent to at least a portion of the n-type contact layer.
12. The optoelectronic device of claim 11 , wherein the p-type metallic contact comprises a multilayered structure including:
an ohmic layer immediately adjacent to the at least a portion of the p-type contact layer, the ohmic layer being transparent to the radiation; and
a reflective layer located adjacent to the ohmic layer.
13. The optoelectronic device of claim 12 , wherein the ohmic layer comprises Nickel.
14. The optoelectronic device of claim 12 , wherein the ohmic layer comprises one or more sub-layers of a metal, the metal including Rhodium.
15. The optoelectronic device of claim 12 , wherein the ohmic layer is transparent to the radiation having the target wavelength, and the reflective layer is at least approximately fifty percent reflective of the radiation having the target wavelength, wherein the target wavelength ranges between approximately 260 nanometers and approximately 360 nanometers.
16. The optoelectronic device of claim 12 , further comprising a reflector protective layer located between the reflective layer and a conductive metallic layer, wherein the reflector protective layer is configured to prevent diffusion of the conductive metallic layer into the reflective layer.
17. The optoelectronic device of claim 16 , wherein the reflector protective layer comprises a metal selected from the group consisting of Pt, Pd, Rh, Ru, Os, and Ir.
18. A method, comprising:
fabricating a semiconductor heterostructure, wherein the semiconductor heterostructure comprises:
a group III nitride semiconductor layer including a plurality of inhomogeneous regions, each inhomogeneous region having a set of attributes differing from a group III nitride material forming the semiconductor layer, wherein the plurality of inhomogeneous regions include a combination of a conductive region and at least one of: a transparent region or a reflective region, wherein each of the plurality of inhomogeneous regions occupies at least five percent of at least one of: a lateral planar area of the semiconductor layer or a volume of the semiconductor layer.
19. The method of claim 18 , further comprising forming a metal contact immediately adjacent to the group III nitride semiconductor layer.
20. The method of claim 18 , wherein the fabricating includes:
epitaxially growing a portion of the group III nitride semiconductor layer;
forming at least one of: the conductive region or the at least one of: the transparent region or reflective region on a surface of the portion of the group III nitride semiconductor layer; and
epitaxially over-growing the group III nitride semiconductor layer after the forming.