Semiconductor device
View Patent ↗This semiconductor device comprises a plurality of first conductive layers arranged above a substrate in a first direction intersecting an upper surface of the substrate. The conductive layers includes a portion in which positions of ends of the first conductive layers made different from each other in a second direction intersecting the first direction. Furthermore, this semiconductor device comprises a transistor electrically connected to the portion of the conductive layers. That transistor comprises: a channel layer extending in the first direction; a gate electrode layer disposed in a periphery of the channel layer; and a gate insulating layer disposed between the channel layer and the gate electrode layer.
1. A semiconductor device, comprising:
a plurality of first conductive layers arranged above a substrate in a first direction intersecting an upper surface of the substrate; the conductive layers including a portion in which positions of ends of the first conductive layers made different from each other in a second direction intersecting the first direction; and
a transistor electrically connected to the portion of the conductive layers,
the transistor comprising:
a channel layer extending in the first direction;
a gate electrode layer disposed in a periphery of the channel layer; and
a gate insulating layer disposed between the channel layer and the gate electrode layer, wherein
the gate electrode layer comprises a connecting portion extending in a third direction intersecting the first direction.
2. The semiconductor device according to claim 1 , wherein
the channel layer includes an oxide semiconductor.
3. The semiconductor device according to claim 2 , wherein
the gate electrode layer comprises a connecting portion extending in a third direction intersecting the first direction.
4. The semiconductor device according to claim 2 , wherein
a lower end of the channel layer is connected to the substrate.
5. The semiconductor device according to claim 2 , wherein
a lower end of the channel layer is closer to the substrate than a lower end of the gate electrode layer.
6. The semiconductor device according to claim 2 , wherein
a lower end of the channel layer is connected to the portion of the conductive layers.
7. The semiconductor device according to claim 2 , further comprising
a memory cell array including memory cells arranged three-dimensionally therein,
wherein one of the memory cells arranged in the first direction is connected to any one of a plurality of the first conductive layers arranged in the first direction.
8. The semiconductor device according to claim 7 , wherein
the gate electrode layer comprises a connecting portion extending in a third direction intersecting the first direction.
9. The semiconductor device according to claim 2 , further comprising:
a second conductive layer extending in the first direction from the portion of the conductive layers; and
an upper layer wiring connected to an upper end of the second conductive layer,
wherein the channel layer is electrically connected to the portion of the conductive layers via the second conductive layer and the upper layer wiring.
10. The semiconductor device according to claim 1 , wherein
a lower end of the channel layer is connected to the substrate.
11. The semiconductor device according to claim 1 , wherein
a lower end of the channel layer is connected to the substrate.
12. The semiconductor device according to claim 1 , wherein
a lower end of the channel layer is closer to the substrate than a lower end of the gate electrode layer.
13. The semiconductor device according to claim 1 , wherein
a lower end of the channel layer is closer to the substrate than a lower end of the gate electrode layer.
14. The semiconductor device according to claim 1 , wherein
a lower end of the channel layer is connected to the portion of the conductive layers.
15. The semiconductor device according to claim 1 , further comprising
a memory cell array including memory cells arranged three-dimensionally therein,
wherein one of the memory cells arranged in the first direction is connected to any one of a plurality of the first conductive layers arranged in the first direction.
16. The semiconductor device according to claim 15 , wherein
the channel layer includes an oxide semiconductor.
17. The semiconductor device according to claim 15 , wherein
the gate electrode layer comprises a connecting portion extending in a third direction intersecting the first direction.
18. The semiconductor device according to claim 1 , further comprising:
a second conductive layer extending in the first direction from the portion of the conductive layers; and
an upper layer wiring connected to an upper end of the second conductive layer,
wherein the channel layer is electrically connected to the portion of the conductive layers via the second conductive layer and the upper layer wiring.