IP Library Granted Patent US 9,614,074
Granted Patent B1
US 9,614,074 · App. 15/076,617 · Granted Apr 4, 2017

Partial, self-biased isolation in semiconductor devices

Inventors: Xin Lin (Phoenix, AZ); Hongning Yang (Chandler, AZ); Jiang-Kai Zuo (Chandler, AZ)
Assignee: NXP USA, INC.
H01L29/7823H01L21/265H01L29/063H01L29/1095H01L29/66681
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Quick Facts
Patent No.
US 9,614,074
App. No.
15/076,617
Granted
Apr 4, 2017
Kind
B1
Abstract

A device includes a semiconductor substrate, a buried doped isolation layer disposed in the semiconductor substrate to isolate the device, a body region disposed in the semiconductor substrate and to which a voltage is applied during operation and in which a channel is formed during operation, and a depletion region disposed in the semiconductor substrate and having a conductivity type in common with the buried doped isolation barrier and the body region. The depletion region reaches a depth in the semiconductor substrate to be in contact with the buried doped isolation layer. The depletion region establishes an electrical link between the buried doped isolation layer and the body region such that the buried doped isolation layer is biased at a voltage level lower than the voltage applied to the body region.

Claims (45)

1. A device comprising:

a semiconductor substrate;

a buried doped isolation layer disposed in the semiconductor substrate to isolate the device;

a body region disposed in the semiconductor substrate and to which a voltage is applied during operation and in which a channel is formed during operation; and

a depletion region disposed in the semiconductor substrate and having a conductivity type in common with the buried doped isolation layer and the body region, the depletion region reaching a depth in the semiconductor substrate to be in contact with the buried doped isolation layer;

wherein the depletion region establishes an electrical link between the buried doped isolation layer and the body region such that the buried doped isolation layer is biased at a voltage level lower than the voltage applied to the body region.

2. The device of claim 1 , wherein the depletion region comprises a depleted well region positioned between, and in contact with, the body region and the buried doped isolation layer.

3. The device of claim 2 , further comprising a buried well region disposed in the semiconductor substrate under and in contact with the body region, wherein the buried well region is in contact with the depleted well region, and has an opposite conductivity type than the body region and the depleted well region to deplete the depleted well region.

4. The device of claim 3 , wherein the buried well region is a floating region having a layout that matches a layout of the body region.

5. The device of claim 2 , wherein the depleted well region has a lower dopant concentration level than the body region.

6. The device of claim 2 , further comprising a gate structure supported by the semiconductor substrate, wherein:

the channel is formed in the body region under the gate structure;

the gate structure defines an accumulation region in the semiconductor substrate in which charge carriers accumulate adjacent the channel during operation, and

the accumulation region is laterally adjacent to the depleted well region.

7. The device of claim 2 , further comprising a drift region through which charge carriers drift after exiting the channel during operation, wherein the depleted well region is in contact with the drift region.

8. The device of claim 7 , wherein the depleted well region laterally extends under the drift region to laterally overlap the drift region.

9. The device of claim 1 , wherein the body region has a dopant concentration profile in common with the depletion region.

10. The device of claim 1 , wherein the body region and the depletion region are constituent sections of a single well region.

11. The device of claim 1 , further comprising a doped isolation well that surrounds the body region to isolate the device, wherein:

the doped isolation well is electrically coupled to the buried doped isolation layer; and

the body region is spaced from the buried doped isolation layer by a portion of the semiconductor substrate.

12. The device of claim 1 , wherein the depletion region extends from a surface of the semiconductor substrate.

13. The device of claim 1 , wherein the depletion region is fully depleted.

14. The device of claim 1 , wherein:

the depletion region comprises first and second sections;

the first section is fully depleted and establishes the link; and

the second section is not fully depleted.

15. The device of claim 1 , further comprising a doped isolation barrier in the semiconductor substrate, wherein:

the doped isolation barrier comprises the buried doped isolation layer and a ring-shaped well;

the ring-shaped well is disposed along a device periphery;

the ring-shaped well is electrically coupled with the buried doped isolation layer; and

the doped isolation barrier and the body region are not electrically tied to one another.

16. A device comprising:

a semiconductor substrate;

a doped isolation barrier disposed in the semiconductor substrate, having a first conductivity type, and comprising a buried doped isolation layer;

a body region disposed in the semiconductor substrate, having the first conductivity type, to which a voltage is applied during operation, and in which a channel is formed during operation;

a drift region disposed in the semiconductor substrate within the device area, having a second conductivity type, and through which charge carriers drift during operation after exiting the channel; and

a depleted well region having the first conductivity type and positioned between, and in contact with, the body region and the buried doped isolation layer;

wherein the depleted well region establishes an electrical link between the buried doped isolation layer and the body region, and

wherein the doped isolation barrier and the body region are not electrically tied to one another.

17. The device of claim 16 , further comprising a floating buried well region having the second conductivity type, wherein:

the floating buried well region is disposed in the semiconductor substrate under and in contact with the body region;

the floating buried well region is laterally adjacent to, and in contact with, the depleted well region;

the depleted well region comprises a fully depleted section disposed between the drift region and the floating buried well region; and

the fully depleted section establishes the electrical link.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 16, 2017
From: LIN, XIN; YANG, HONGNING; ZUO, JIANG-KAI
To: NXP USA, INC.
Reel/Frame 041278/0913 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040626 FRAME: 0683. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME EFFECTIVE NOVEMBER 7, 2016. Recorded Jan 12, 2017
From: NXP SEMICONDUCTORS USA, INC. (MERGED INTO); FREESCALE SEMICONDUCTOR, INC. (UNDER)
To: NXP USA, INC.
Reel/Frame 041414/0883 →
CHANGE OF NAME Recorded Nov 16, 2016
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 040626/0683 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →