Group-III nitride semiconductor device and method for fabricating the same
The present invention discloses a group-III nitride semiconductor device, which comprises a substrate, a buffer layer, a semiconductor stack structure, and a passivation film. The buffer layer is disposed on the substrate. The semiconductor stack structure is disposed on the buffer layer and comprises a gate, a source, and a drain. In addition, a gate insulating layer is disposed between the gate and the semiconductor stack structure for forming a HEMT. The passivation film covers the HEMT and includes a plurality of openings corresponding to the gate, the source, and the drain, respectively. The material of the passivation film is silicon oxynitride.
1. The method for fabricating a group-III nitride semiconductor device, comprising steps of:
etching a stack structure with a depth between 250 nm and 1000 nm, and forming a first semiconductor stack structure and a second semiconductor stack structure;
performing a first surface oxidation process;
coating an ohmic metal layer, removing said ohmic metal layer, forming a first source and a first drain on said first semiconductor stack structure, and forming a second source and a second drain on said second semiconductor stack structure;
defining fluorine-ion injection regions on said second semiconductor stack structure, and injecting fluorine ions; performing thermal treatment for fluorine ions and a second surface oxidation process;
coating an insulating layer, etching said insulating layer, forming a first gate insulating layer between said first source and said first drain, and forming a second gate insulating layer between said second source and said second drain;
coating a Schottky metal layer, removing said Schottky metal layer, forming a first gate on said first gate insulating layer, and forming a second gate on said second gate insulating layer; and
coating a passivation film, and forming a plurality of openings on said passivation film corresponding to said first drain, said second gate, and said second source, respectively.
2. The method for fabricating of claim 1 , wherein said stack structure comprises a channel layer, a barrier layer, and a cover layer.
3. The method for fabricating of claim 1 , and further comprising:
forming a third semiconductor stack structure and forming a protection diode on said third semiconductor stack structure while etching said stack structure;
forming a negative electrode on said protection diode concurrently while removing said ohmic metal layer; and
forming a positive electrode on said protection diode concurrently while removing said Schottky metal layer.