Gas sensor
Shown is a gas sensor including a sensor element, a measurement chamber and an emitter element. The sensor element has a MEMS membrane which is arranged in a first substrate region. Furthermore, the measurement chamber is embodied to receive a measurement gas.
1. A gas sensor, comprising:
a sensor element comprising;
a first substrate, comprising a MEMS membrane associated with the sensor element; and
a second substrate arranged on top of the first substrate, wherein the first substrate and the second substrate define at least a portion of a reference gas chamber;
an emitter element comprising:
an emitter unit arranged beside the MEMS membrane on the first substrate and configured to emit electromagnetic radiation; and
an emitter cavity arranged above the emitter unit;
a measurement chamber above the second substrate, which is embodied to receive a measurement gas, wherein the measurement chamber includes at least one surface region configured to reflect electromagnetic radiation from the emitter unit onto the sensor element; and
wherein the emitter element and the sensor element are arranged in a stationary manner with respect to one another.
2. The gas sensor as claimed in claim 1 , wherein the MEMS membrane is embodied to have a deflection which is dependent on the energy of the electromagnetic radiation present.
3. The gas sensor as claimed in claim 1 , wherein the emitter unit is embodied to emit the electromagnetic radiation in a pulsating manner with a frequency that is greater than 0.1 Hz or greater than 0.5 Hz or greater than 1 Hz.
4. The gas sensor as claimed in claim 1 , further comprising a third substrate arranged under the first substrate, wherein the third substrate at least partially defines a pressure equalization chamber.
5. The gas sensor as claimed in claim 4 , wherein the third substrate defines at least a portion of a second emitter cavity disposed adjacent to the emitter element.
6. The gas sensor as claimed in claim 1 , wherein the second substrate further comprises a shadow mask arranged above the MEMS membrane.
7. The gas sensor as claimed in claim 1 , wherein contacts of the emitter element and of the sensor element are guided by means of a through semiconductor via (TSV) within the emitter element and the sensor element to a common substrate plane and embodied at a main surface region of the gas sensor that is accessible from outside.
8. The gas sensor as claimed in claim 1 , wherein contacts of the emitter element and the sensor element are embodied laterally at a surface region of the emitter element and the sensor element, wherein a printed circuit board is arranged parallel to a thickness direction of the emitter element and the sensor element and contacts the laterally embodied contacts.
9. The gas sensor as claimed in claim 1 , wherein the MEMS membrane forms a micromechanical capacitive sensor.
10. The gas sensor as claimed in claim 1 , wherein the MEMS membrane is embodied as a microphone.
11. The gas sensor as claimed in claim 1 , wherein the emitter element is embodied as a microelectromechanical emitter.