Gas purge unit
A gas purge unit introduces a cleaning gas into a container with a main opening there through for taking a housed object in and out. The gas purge unit includes a blowout member and a supply portion. The blowout member with a cylindrical shape has an elongated hollow extending in a longitudinal direction and a discharge portion of a porous body connecting between the elongated hollow and the outside to discharge the cleaning gas. The supply portion is connected to the elongated hollow through a connection hole formed at one end of the blowout member to supply the cleaning gas to the elongated hollow.
1. A load port comprising a gas purge unit for introducing a cleaning gas into a container with a main opening therethrough for taking a housed object in and out, a wall opposed to the container and formed a wall-side-opening and a door opening and closing the wall-side opening and the main opening, wherein the gas purge unit comprises:
a blowout member with a cylindrical shape comprising an elongated hollow extending in a longitudinal direction and a discharge portion of a porous body connecting between the elongated hollow and the outside to discharge the cleaning gas through the porous body,
a supply portion connected to the elongated hollow through a connection hole formed at one end of the blowout member to supply the cleaning gas to the elongated hollow, and
a shielding portion extending in the longitudinal direction of the blowout member and arranged at a part of radial directions perpendicular to the longitudinal direction to shield a cleaning gas flow toward opposite side to the main opening, wherein the shielding portion is attached on an inner surface of the wall opposite to a container side of the wall,
wherein the shielding portion has a first part shielding the cleaning gas flow toward opposite side to the main opening along the inner surface of the wall, a second part shielding the cleaning gas flow toward opposite side to the main opening along a perpendicular direction to the inner surface of the wall, a third part shielding the cleaning gas flow toward the main opening along the inner surface of the wall and a fourth part toward the main opening along a perpendicular direction to the inner surface of the wall and forming a gap between the third part.