IP Library Granted Patent US 10,294,524
Granted Patent B2
US 10,294,524 · App. 15/088,549 · Granted May 21, 2019

Methods of generation of pores in sheets of hexagonal boron nitride and applications thereof

Inventors: Alexander K. Zettl (Kensington, CA); Gabriel P. Dunn (Berkeley, CA); Stephen M. Gilbert (Albany, CA)
Assignee: The Regents of the University of California
C12Q1/6869G01N33/48721
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Quick Facts
Patent No.
US 10,294,524
App. No.
15/088,549
Granted
May 21, 2019
Kind
B2
Abstract

This disclosure provides systems, methods, and apparatus related to few-layer and monolayer hexagonal boron nitride having a pore therein. In one aspect, a method comprises providing a sheet of hexagonal boron nitride (h-BN). A defect is created in the sheet of h-BN. The sheet of h-BN is heated to a temperature above about 500° C. The defect in the sheet of h-BN is irradiated with charged particles to enlarge the defect to a hexagonal-shaped pore or a parallelogram-shaped pore in the sheet of h-BN.

Claims (26)

1. A method comprising:

(a) providing a sheet of hexagonal boron nitride (h-BN);

(b) creating a defect in the sheet of h-BN by depositing a catalyst on the sheet of h-BN and heating the catalyst;

(c) heating the sheet of h-BN to a temperature above about 500° C.; and

(d) irradiating the defect in the sheet of h-BN with charged particles to enlarge the defect to a hexagonal-shaped pore or a parallelogram-shaped pore in the sheet of h-BN.

2. The method of claim 1 , further comprising:

fabricating the sheet of h-BN.

3. The method of claim 1 , wherein the charged particles comprise particles selected from a group consisting of electrons, protons, and alpha particles.

4. The method of claim 1 , wherein the charged particles comprise electrons, and wherein the electrons have energies of about 40 kV to 120 kV.

5. The method of claim 1 , wherein the hexagonal-shaped pore or the parallelogram-shaped pore in the sheet h-BN has a dimension of about 1 nanometer to 3 nanometers across the hexagonal-shaped pore or the parallelogram-shaped pore.

6. The method of claim 1 , wherein the catalyst comprises a transition metal.

7. The method of claim 1 , wherein the catalyst comprises a metal selected from a group consisting of iron, cobalt, and nickel.

8. The method of claim 1 , wherein the sheet of h-BN is heated to a temperature of about 700° C. in operation (c).

9. The material of claim 1 , wherein the sheet of h-BN comprises a monolayer of h-BN.

10. The method of claim 1 , wherein the catalyst is heated using a laser in operation (b).

11. The method of claim 1 , wherein the catalyst reacts with the sheet of h-BN to form the defect in operation (b).

12. The method of claim 1 , wherein the catalyst comprises a single atom of the catalyst.

13. The method of claim 1 , wherein the catalyst comprises a cluster of atoms of the catalyst.

14. The method of claim 1 , wherein the catalyst comprises a nanoparticle.

15. The method of claim 1 , wherein the catalyst has dimensions of about 1 nanometer or less than about 1 nanometer.

16. The method of claim 1 , wherein photolithography is used to define an area of the sheet of h-BN on which the catalyst is deposited in operation (b).

17. The method of claim 1 , wherein the charged particles comprise oxygen ions, nitrogen ions, argon ions, or gallium ions.

18. The method of claim 1 , wherein defect in the sheet of h-BN is irradiated with charged particles for about 15 seconds to 60 seconds in operation (d).

19. The method of claim 1 , further comprising:

functionalizing the hexagonal-shaped pore or the parallelogram-shaped pore in the sheet of h-BN.

20. The method of claim 1 , wherein the catalyst is deposited on the sheet of h-BN in operation (b) by evaporation, chemical vapor deposition, atomic layer deposition, or sputtering.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 13, 2018
From: ZETTL, ALEXANDER K.; DUNN, GABRIEL P.; GILBERT, STEPHEN M.
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 044910/0783 →
CONFIRMATORY LICENSE Recorded Jun 1, 2016
From: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 038990/0324 →
Continuity (2)
Provisional Application 62141489 · Apr 1, 2015
Related Publication 20160334366A1 · Nov 17, 2016