Zener triggered silicon controlled rectifier with small silicon area
A semiconductor device includes a P-type semiconductor substrate, an N-well and a P-well disposed adjacent to each other and extending along a first direction within the P-type semiconductor substrate, a first N+ doped region and a first P+ doped region extending along the first direction within the N-well and spaced away from each other along a second direction perpendicular to the first direction, a second N+ doped region and a second P+ doped region extending along the first direction within the P-well and spaced away from each other along the second direction, and a plurality of third N+ doped regions and a plurality of P+ doped regions alternatively disposed in a junction region formed between the N-well and P-well the third N+ doped regions. The third N+ doped regions and the third P+ doped regions form a Zener diode.
1. A semiconductor device comprising:
a P-type semiconductor substrate;
an N-well and a P-well disposed adjacent to each other and extending along a first direction within the P-type semiconductor substrate;
a first N+ doped region and a first P+ doped region extending along the first direction within the N-well and spaced away from each other along a second direction perpendicular to the first direction;
a second N+ doped region and a second P+ doped region extending along the first direction within the P-well and spaced away from each other along the second direction; and
a plurality of third N+ doped regions and a plurality of P+ doped regions alternatively disposed in a junction region formed between the N-well and P-well and extending along the first direction, the third N+ doped regions and the third P+ doped regions being separated from the adjacent first P+ doped region and second N+ doped region,
wherein the third N+ doped regions and the third P+ doped regions form a Zener diode.
2. The semiconductor device of claim 1 , wherein the first N+ doped region and the first P+ doped region are connected to each other to form an anode of a silicon controlled rectifier (SCR) device.
3. The semiconductor device of claim 1 , wherein the second N+ doped region and the second P+ doped region are connected to each other to form a cathode of a silicon controlled rectifier (SCR) device.
4. The semiconductor device of claim 1 , wherein the semiconductor device comprises an NPN transistor and a PNP transistor, and the Zener diode being disposed between a base of the NPN transistor and a base of the PNP transistor.
5. The semiconductor device of claim 1 , further comprising a first insulation structure disposed between the first N+ doped region and the first P+ doped region, and a second insulation structure disposed between the second N+ doped region and the second P+ doped region.
6. The semiconductor device of claim 5 , wherein the first and second insulator structures are shallow trench insulator structures.
7. An electronic device comprising a semiconductor device and an electronic component connected to the semiconductor device, wherein the semiconductor device comprises:
a P-type semiconductor substrate;
an N-well and a P-well disposed adjacent to each other and extending along a first direction within the P-type semiconductor substrate;
a first N+ doped region and a first P+ doped region extending along the first direction within the N-well and spaced away from each other along a second direction perpendicular to the first direction;
a second N+ doped region and a second P+ doped region extending along the first direction within the P-well and spaced away from each other along the second direction; and
a plurality of third N+ doped regions and a plurality of P+ doped regions alternatively disposed in a junction region formed between the N-well and P-well and extending along the first direction, the third N+ doped regions and the third P+ doped regions being separated from the adjacent first P+ doped region and second N+ doped region,
wherein the third N+ doped regions and the third P+ doped regions form a Zener diode.
8. A Zener-triggered silicon controlled rectifier (SCR) device including a first node and a second node, the Zener-triggered SCR device comprising:
a P-type semiconductor substrate;
an N-well and a P-well disposed adjacent to each other and extending along a first direction within the P-type semiconductor substrate;
a first N+ doped region and a first P+ doped region extending along the first direction within the N-well and separated from each other by a first shallow trench insulation structure;
a second N+ doped region and a second P+ doped region extending along the first direction within the P-well and separated from each other by a second shallow trench insulation structure;
a plurality of third N+ doped regions and a plurality of P+ doped regions alternatively disposed in a junction region formed between the N-well and the P-well to form a Zener diode;
a PNP transistor having a base and its emitter connected to the first node; and
an NPN transistor having an emitter connected to the second node.
9. The Zener-triggered SCR device of claim 8 , further comprising:
a first resistor connected between the base of the PNP transistor and the first node; and
a second resistor connected between a base of the NPN transistor and the second node.
10. The Zener-triggered SCR device of claim 9 , wherein the Zener diode is connected between the base of the PNP transistor and the base of the NPN transistor.