Nonvolatile semiconductor storage device and method for manufacturing the same
According to an aspect of the present invention, there is provided a nonvolatile semiconductor storage device including: a semiconductor substrate; a source region and a drain region that are formed in the semiconductor substrate so as to be separated from each other and so as to define a channel region therebetween; a tunnel insulating film that is formed on the channel region; an insulative charge storage film that is formed on the tunnel insulating film; a conductive charge storage film that is formed on the insulative charge storage film so as to be shorter than the insulative charge storage film in a channel direction; an interlayer insulating film that is formed on the conductive charge storage film; and a gate electrode that is formed on the interlayer insulating film.
1. A nonvolatile semiconductor storage device, comprising:
a semiconductor portion including a channel region sandwiched between a source region and a drain region;
a tunnel insulating film formed on the channel region;
a charge storage layer formed on the tunnel insulating film;
an interlayer insulating film formed on the charge storage layer;
a control gate formed on the interlayer insulating film; and
an insulating film insulating a side surface of the charge storage layer,
wherein the charge storage layer comprises a conductive layer and an insulating layer;
an end portion of the insulating layer extends beyond an end portion of the conductive layer in a first direction of the side surface,
the channel region comprises a channel length in the first direction;
the insulating film includes
a first portion insulating a side surface of the insulating layer, and
a second portion insulating a side surface of the conductive layer and at least a part of another surface of the insulating layer extending beyond the side surface of the conductive layer; and
the first portion and the second portion comprise a same material.
2. The nonvolatile semiconductor storage device of claim 1 ,
wherein the insulating film comprising a silicon oxide film is formed from a side portion of the conductive layer along a region corresponding to the width of the insulating layer.
3. The nonvolatile semiconductor storage device of claim 1 ,
wherein the control gate comprises a metal.
4. The nonvolatile semiconductor storage device of claim 1 ,
wherein the conductive layer of the charge storage layer comprises a polysilicon; and the insulating layer of the charge storage layer comprises at least one of a silicon nitride and a hafnium oxide.
5. The nonvolatile semiconductor storage device of claim 1 ,
wherein a width of the conductive layer is smaller than a width of the insulating layer.
6. The nonvolatile semiconductor storage device of claim 1 ,
wherein, in the charge storage layer, the end portion of the conductive layer is retracted as compared with the end portion of the insulating layer.
7. The nonvolatile semiconductor storage device of claim 1 ,
wherein, in the charge storage layer, a circumference of the insulating layer expands more than a circumference of the conductive layer as viewed from above.
8. A non-volatile memory, comprising:
a non-volatile storage semiconductor device comprising
a semiconductor portion including a channel region sandwiched between a source region and a drain region;
a tunnel insulating film formed on the channel region;
a charge storage layer formed on the tunnel insulating film;
an interlayer insulating film formed on the charge storage layer;
a control gate formed on the interlayer insulating film; and
an insulating film insulating a side surface of the charge storage layer,
wherein the charge storage layer comprises a conductive layer and an insulating layer;
an end portion of the insulating layer extends beyond an end portion of the conductive layer in a first direction of the side surface,
the channel region comprises a channel length in the first direction;
the insulating film includes
a first portion insulating a side surface of the insulating layer, and
a second portion insulating a side surface of the conductive layer and at least a part of another surface of the insulating layer extending beyond the side surface of the conductive layer; and
the first portion and the second portion comprise the same material.