HEALING OF THIN GRAPHENIC-BASED MEMBRANES VIA CHARGED PARTICLE IRRADIATION
A method of forming a membrane is described. A graphenic-based membrane is formed on a growth substrate, where the graphenic-based membrane have one or more layers of graphenic-based material. The graphenic-based membrane is removed from the growth substrate. A region of the graphenic-based membrane having intrinsic or native defects is identified. The region of the graphenic-based membrane is irradiated with charged particles while introducing carbonaceous material on a surface of the one or more layers of graphenic-based material to heal the intrinsic or native defects.
1 . A method of forming a membrane, comprising:
forming a graphenic-based membrane on a growth substrate, the graphenic-based membrane having one or more layers of graphenic-based material;
removing the graphenic-based membrane from the growth substrate;
identifying a region of the graphenic-based membrane having intrinsic or native defects; and
irradiating the region of the graphenic-based membrane with charged particles while introducing carbonaceous material on a surface of the one or more layers of graphenic-based material to heal the intrinsic or native defects.
2 . The method of claim 1 , wherein the graphenic-based membrane is a graphene-based membrane.
3 . A method of forming a membrane, comprising:
forming a graphenic-based membrane on a growth substrate, the graphenic-based membrane having one or more layers of graphenic-based material, and carbonaceous material on a surface of the one or more layers of graphenic-based material;
removing the graphenic-based membrane from the growth substrate;
identifying a region of the graphenic-based membrane having intrinsic or native defects; and
irradiating the region of the graphenic-based membrane with charged particles to heal the intrinsic or native defects.
4 . The method of claim 3 , wherein the graphenic-based membrane is a graphene-based membrane.
5 . The method of claim 3 , further comprising performing a conditioning treatment on the graphenic-based membrane while the graphenic-based membrane is on the growth substrate.
6 . The method of claim 5 , wherein the performing a conditioning treatment comprises an ion beam treatment of an initial graphenic-based membrane,
7 . The method of claim 6 , wherein the irradiating the region of the graphenic-based membrane with charged particles is performed after performing the conditioning treatment.
8 . The method of claim 3 , wherein the graphenic-based membrane comprises a plurality of selectively introduced perforations in addition to the intrinsic or native defects.
9 . The method of claim 8 , wherein the selectively introduced perforations have a first characteristic size, and the region includes intrinsic or native defects of a second characteristic size larger than the first characteristic size.
10 . The method of claim 9 , wherein the irradiating the region of the graphenic-based membrane with charged particles comprises:
identifying the region based on the intrinsic or native defects of a second characteristic size larger than the first characteristic size; and
scanning a charged particle beam over the identified region.
11 . A method of forming a membrane, comprising:
producing a graphenic-based membrane having one or more layers of graphenic-based material, the graphenic-based membrane having intrinsic or native defects in a region; and
irradiating the region of the graphenic-based membrane with charged particles while introducing carbonaceous material on a surface of the one or more layers of graphenic-based material to heal the intrinsic or native defects.
12 . The method of claim 11 , wherein the graphenic-based membrane is a graphene-based membrane.
13 . A method of forming a membrane, comprising:
producing a graphenic-based membrane having one or more layers of graphenic-based material, and carbonaceous material on a surface of the one or more layers of graphenic-based material, the graphenic-based membrane having intrinsic or native defects in a region; and
irradiating the region of the graphenic-based membrane with charged particles to heal the intrinsic or native defects.
14 . The method of claim 13 , wherein the intrinsic or native defects comprise at least one of lattice anomalies, pores, tears, cracks or wrinkles.
15 . The method of claim 13 , wherein the intrinsic or native defects comprise tears.
16 . The method of claim 13 , wherein the irradiating the region of the graphenic-based membrane comprises irradiating with charged particles having an ion energy ranging from 50 eV to 40 keV, and a flux ranging from 10 10 ions/cm 2 /s to 10 17 ions/cm 2 /s.
17 . The method of claim 13 , wherein the irradiating the region of the graphenic-based membrane comprises irradiating with one of a broad beam or a flood source.
18 . The method of claim 13 , wherein the producing a graphenic-based membrane comprises:
forming an initial graphenic-based membrane on a growth substrate;
removing the initial graphenic-based membrane from the growth substrate; and
positioning the removed graphenic-based membrane on a support substrate.
19 . The method of claim 17 , wherein the producing a graphenic-based membrane further comprises performing a conditioning treatment on the initial graphenic-based membrane while the initial graphenic-based membrane is on the growth substrate.
20 . The method of claim 19 , wherein the performing a conditioning treatment comprises an ion beam treatment of the initial graphenic-based membrane,
21 . The method of claim 20 , wherein the irradiating the region of the graphenic-based membrane with charged particles is performed after performing the conditioning treatment.
22 . The method of claim 19 , wherein the conditioning treatment is a treatment selected from the group consisting of a thermal treatment, a UV-oxygen treatment, and ion beam treatment, or combinations thereof.
23 . The method of claim 18 , wherein the forming an initial graphenic-based membrane comprises a chemical vapor deposition technique.
24 . The method of claim 18 , wherein the irradiating the region of the graphenic-based membrane with charged particles is performed while the removed graphenic-based membrane is on the support substrate.
25 . The method of claim 13 , wherein the charged particles comprise a noble gas. Ga, Au. Bi, or C60.
26 . The method of claim 25 , wherein the charged particles comprise helium.
27 . The method of claim 13 , wherein the carbonaceous material comprises amorphous carbon.
28 . The method of claim 13 , wherein the carbonaceous material is a material selected from the group consisting of amorphous carbon, one or more hydrocarbons, oxygen containing carbon compounds, nitrogen containing carbon compounds, or any combination thereof.
29 . The method of claim 13 , wherein the graphenic-based membrane comprises multilayer graphene material.
30 . The method of claim 29 , wherein the multilayer graphene material comprises between about 10 and 20 graphene material layers.
31 . A method of forming a membrane, comprising:
producing a graphenic-based membrane having one or more layers of graphenic-based material;
identifying a region of the graphenic-based membrane having intrinsic or native defects;
irradiating the identified region of the graphenic-based membrane with charged particles while introducing carbonaceous material on a surface of the one or more layers of graphenic-based material to heal the intrinsic or native defects.
32 . The method of claim 31 , wherein the graphenic-based membrane is a graphene-based membrane.
33 . A method of forming a membrane, comprising:
producing a graphenic-based membrane having one or more layers of graphenic-based material, and carbonaceous material on a surface of the one or more layers of graphenic-based material;
identifying a region of the graphenic-based membrane having intrinsic or native defects;
irradiating the identified region of the graphenic-based membrane with charged particles to heal the intrinsic or native defects.
34 . A method of forming a membrane, comprising:
producing a graphenic-based membrane having one or more layers of graphenic-based material the graphenic-based membrane having intrinsic or native defects in a region, and having a plurality of selectively introduced perforations in addition to the intrinsic or native defects; and
irradiating the region of the graphenic-based membrane with charged particles while introducing carbonaceous material on a surface of the one or more layers of graphenic-based material to heal the intrinsic or native defects.
35 . The method of claim 34 , wherein the graphenic-based membrane is a graphene-based membrane.
36 . A method of forming a membrane, comprising:
producing a graphenic-based membrane having one or more layers of graphenic-based material, and carbonaceous material on a surface of the one or more layers of graphenic-based material, the graphenic-based membrane having intrinsic or native defects in a region, and having a plurality of selectively introduced perforations in addition to the intrinsic or native defects; and
irradiating the region of the graphenic-based membrane with charged particles to heal the intrinsic or native defects.
37 . The method of claim 36 , wherein the graphenic-based membrane is a graphene-based membrane.
38 . The method of claim 36 , wherein the selectively introduced perforations have a first characteristic size, and the region includes intrinsic or native defects of a second characteristic size larger than the first characteristic size.
39 . The method of claim 38 , wherein the irradiating the region of the graphenic-based membrane with charged particles comprises:
identifying the region based on the intrinsic or native defects of a second characteristic size larger than the first characteristic size; and
scanning a charged particle beam over the identified region.
40 . A method of forming a membrane, comprising:
forming a graphenic-based membrane on a growth substrate, the graphenic-based membrane having one or more layers of graphenic-based material;
performing a conditioning treatment comprises an ion beam treatment on the graphenic-based membrane while the graphenic-based membrane is on the growth substrate; and
irradiating the region of the graphenic-based membrane with charged particles while introducing carbonaceous material on a surface of the one or more layers of graphenic-based material to heal the intrinsic or native defects, wherein the irradiating the region of the graphenic-based membrane with charged particles is performed after performing the conditioning treatment.
41 . The method of claim 40 , wherein the graphenic-based membrane is a graphene-based membrane.
42 . A method of forming a membrane, comprising:
forming a graphenic-based membrane on a growth substrate, the graphenic-based membrane having one or more layers of graphenic-based material, and carbonaceous material on a surface of the one or more layers of graphenic-based material;
performing a conditioning treatment comprises an ion beam treatment on the graphenic-based membrane while the graphenic-based membrane is on the growth substrate; and
irradiating the region of the graphenic-based membrane with charged particles to heal the intrinsic or native defects, wherein the irradiating the region of the graphenic-based membrane with charged particles is performed after performing the conditioning treatment.
43 . The method of claim 42 , wherein the graphenic-based membrane is a graphene-based membrane.