IP Library Granted Patent US 10,308,814
Granted Patent B2
US 10,308,814 · App. 15/118,472 · Granted Jun 4, 2019

Coating composition, method for producing same and use thereof

Inventors: Duy Vu Pham (Oberhausen, DE); Dennis Weber (Dortmund, DE); Felix Jaehnike (Bochum, DE)
Assignee: Evonik Degussa GmbH
C09D1/00C09D5/00C09D7/20H01L21/02192H01L21/02205H01L21/02282H01L21/02565H01L21/02664H01L29/24H01L29/7869
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Quick Facts
Patent No.
US 10,308,814
App. No.
15/118,472
Granted
Jun 4, 2019
Kind
B2
Abstract

The present invention relates to a coating composition producible from at least one yttrium-containing precursor, a solvent A, and a solvent B, which is different from the solvent A, the ratio of the vapor pressure of the solvent A at 20° C. to the vapor pressure of solvent B at 20° C. being p A p B ≥ 10 , to methods for producing it, and to its use.

Claims (40)

1. A coating composition that can be produced by mixing: a) at least one yttrium-containing precursor; b) a solvent A; and c) a solvent B, which is different from solvent A, wherein the ratio of the vapour pressure of solvent A at 20° C. to the vapour pressure of solvent B at 20° C. is:

p

A

p

B

10

and wherein:

a) the at least one yttrium-containing precursor comprises a yttrium oxoalkoxide;

b) the coating composition does not comprise water as a solvent; and

c) the only metal or semimetal present in precursors is yttrium.

2. The coating composition of claim 1 , wherein the at least one yttrium-containing precursor is further comprises one or more compounds selected from the group consisting of: yttrium alkoxides; yttrium alkoxyalkoxides; and yttrium salts.

3. The coating composition of claim 1 , wherein the water content in the coating composition (including water absorbed from the atmosphere) is not more than 500 ppm and the coating composition is free of additives.

4. The coating composition of claim 1 , wherein the at least one yttrium-containing precursor is Y 5 O(O-iPr) 13 .

5. The coating composition of claim 1 , wherein the fraction of all yttrium-containing precursors used is 0.1 to 10 wt %, based on the total mass of the formulation.

6. The coating composition of claim 1 , wherein the solvents are selected from the group consisting of: alcohols; alkoxy alcohols; hydroxy ethers; carboxylic esters and lactic esters.

7. The coating composition of claim 1 , wherein the difference in the boiling points of the two solvents A and B under SATP conditions is ≥30° C.

8. The coating composition of claim 1 , wherein the boiling point of solvent A under SATP conditions is 50 to 140° C.

9. The coating composition of claim 8 , wherein solvent A is selected from the group consisting of: 1-methoxy-2-propanol; 2-methoxyethanol; butyl acetate; isopropanol; tert-butanol; and ethanol.

10. The coating composition of claim 1 , wherein the boiling point of solvent B under SATP conditions is 100 to 200° C.

11. The coating composition of claim 10 , wherein solvent B is selected from the group consisting of: 1-hexanol; cyclohexanol; tetrahydrofurfuryl alcohol; 1-methoxy-2-propyl acetate; and ethyl lactate.

12. The coating composition of claim 1 , wherein the fraction of solvent A is 75 to 99 vol % and the fraction of solvent B is 1 to 25 wt %, based on the total volume of solvents present.

13. The coating composition of claim 1 , wherein, in addition to A and B, said composition comprises one or more additional solvents.

14. A composition comprising a layer of the coating composition of claim 1 , wherein said coating composition coats a layer of semiconductor.

15. The composition of claim 14 , wherein said layer of semiconductor comprises indium oxide.

16. A method for producing a coating composition comprising, mixing at least one yttrium-containing precursor, a solvent A, and a solvent B, which is different from the solvent A, wherein the ratio of the vapour pressure of solvent A at 20° C. to the vapour pressure of solvent B at 20° C. is

p

A

p

B

10

and wherein:

a) the at least one yttrium-containing precursor comprises a yttrium oxoalkoxide;

b) the coating composition does not comprise water as a solvent; and

c) the only metal or semimetal present in precursors is yttrium.

17. The method of claim 16 , wherein further solvents or additives are mixed with said at least one yttrium-containing precursor, a solvent A, and a solvent B.

18. The method of claim 16 , wherein the at least one yttrium-containing precursor is further comprises one or more compounds selected from the group consisting of: yttrium alkoxides; yttrium alkoxyalkoxides; and yttrium salts.

19. The method of claim 16 , wherein the water content in the coating composition (including water absorbed from the atmosphere) is not more than 500 ppm and the coating composition is free of additives.

20. The method of claim 16 , wherein the at least one yttrium-containing precursor is Y 5 O(O-tPr) 13 .

Assignments (2)
CHANGE OF NAME Recorded Dec 26, 2019
From: EVONIK DEGUSSA GMBH
To: EVONIK OPERATIONS GMBH
Reel/Frame 051419/0068 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 17, 2016
From: PHAM, DUY VU; WEBER, DENNIS; JAEHNIKE, FELIX
To: EVONIK DEGUSSA GMBH
Reel/Frame 040653/0465 →
Priority Claims (1)
DE 10 2014 202 718 · Feb 14, 2014 · national
Continuity (1)
Related Publication 20170174899A1 · Jun 22, 2017