Sample holder with light emitting and transferring elements for a charged particle beam apparatus
View Patent ↗The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element ( 23 ) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means ( 203 ) to generate a transmission charged particle image of the sample.
1. A sample holder comprising:
a sample placement portion on which a light emitting member caused to emit light by charged particles that have traversed or scattered inside the sample; and
a light transferring member constituting a light transfer path for transferring light launched from a face non-parallel to a face of the light emitting member on which the sample is placed toward a detector.
2. The sample holder according to claim 1 ,
wherein the face non-parallel to the face on which the sample is placed is a side face of the light emitting member.
3. The sample holder according to claim 1 ,
wherein the light emitting member and the light transferring member are integrally moved.
4. The sample holder according to claim 3 ,
wherein the light transferring member is synchronized with tilting and movement of the light emitting member.
5. The sample holder according to claim 1 ,
wherein a detector for detecting light transferred by the light transferring member is provided.
6. The sample holder according to claim 5 ,
wherein the light emitting member, the light transferring member, and the detector are integrally moved.
7. The sample holder according to claim 1 ,
wherein the light transferring means includes a light gathering means for gathering light from the light emitting member.
8. The sample holder according to claim 7 ,
wherein the light gathering means is a reflecting member reflecting light that comes from the light emitting member and does not go directly to a detector and directing the same toward the detector.
9. The sample holder according to claim 8 ,
wherein the reflecting member is in a shape forming at least a part of an ellipse embracing the light emitting member and the light emitting member and the detector are disposed so as to embrace two focal point positions of the ellipse.
10. The sample holder according to claim 1 ,
wherein the light transfer path includes a spectroscopic means that separates light generated at the light emitting member according to wavelengths.
11. The sample holder according to claim 5 ,
wherein a launching face from which light from the light emitting member is launched is larger than a detection surface of the detector and a tapered light transferring means is provided between the light emitting member and the detector.
12. An image generation method comprising the steps of:
applying a charged particle beam to a sample placed on a light emitting member caused to emit light by charged particles;
launching light generated from the light emitting member by charged particles that have traversed or scattered inside the sample from a face non-parallel to a face of the light emitting member on which the sample is placed;
transferring the launched light toward a detector;
detecting the transferred light with the detector; and
generating an image of the sample based on a signal from the detector.
13. The image generation method according to claim 12 , comprising the step of:
integrally moving the light emitting member and a light transferring member constituting a light transfer path for transferring light generated from the light emitting member toward the detector.
14. A sample holder comprising:
a sample placement portion on which a light emitting member caused to emit light by charged particles that have traversed or scattered inside a sample is placed; and
a light gathering means for gathering light from the light emitting member toward a detector.
15. The sample holder according to claim 14 ,
wherein the light emitting member and the light gathering means are integrally moved.
16. The sample holder according to claim 14 ,
wherein a support for supporting the light emitting member is provided, and
wherein the light gathering means is formed in the support.
17. The sample holder according to claim 14 ,
wherein a reflecting member that reflects emitted light from between the face of the light emitting member on which the sample is placed and a face on the side where the light gathering means is placed and directs the same toward the light gathering means is provided.
18. The sample holder according to claim 14 ,
wherein the light gathering means is a reflecting member reflecting light that comes from the light emitting member and does not go directly to a detector and directing the same toward the detector.