Microspectroscopy device
With a microspectroscopy device provided with an objective lens with a high numerical aperture, a defocus arises from thermal drift, etc., necessitating auto-focusing. Conventional auto-focus based on through-focus image acquisition takes time, and thus, it cannot be applied to continuous measurement over a long time wherein high-speed sampling is carried out. The present invention addresses this problem by having a defocus-sensing beam that has either defocus or astigmatism fall incident on the objective lens. Since how the image of the spot of the beam for defocus sensing blurs differs depending on the orientation of the defocus, real-time detection of the amount and orientation of defocus becomes possible, and high-speed realtime auto-focus becomes possible.
1. A microspectroscopy device comprising:
a light source for outputting an excitation beam for exciting a light emission from a sample;
an objective lens for illuminating the sample with the excitation beam;
an imaging device for detecting the light emission from the sample excited by the excitation beam;
a defocus-sensing beam having a wavelength or an optical axis different from a wavelength or an optical axis of the excitation beam incident on the objective lens;
a stage for moving the sample in a direction of an optical axis of the objective lens;
a monitoring imaging device for observing a shape of an image formed on the sample by the defocus-sensing beam having passed through the objective lens; and
a controller for detecting a direction and an amount of defocus from the shape of the image of the defocus-sensing beam and for sending a feedback control signal so as to move the stage to a focus position of the objective lens,
the defocus-sensing beam includes at least two or more defocus-sensing beams,
at least one of the at least two or more defocus-sensing beams is focused by the objective lens at a position closer to the objective lens than a position where the excitation light beam is focused by the objective lens, and at least one of the at least two or more defocus-sensing beams is focused by the objective lens at a position farther from the objective lens than the position where the excitation light beam is focused by the objective lens, and
the microspectroscopy device further comprises a monitoring imaging device for observing the defocus.
2. The microspectroscopy device according to claim 1 , comprising at least two beam splitters on an optical path of the excitation light beam, a concave lens on one optical path after splitting, and a convex lens on the other optical path after the splitting, provided to generate the defocus-sensing beam.
3. The microspectroscopy device according to claim 1 , wherein the controller detects a tilt of a surface of the sample in at least one or more directions.
4. The microspectroscopy device according to claim 1 , comprising a multi-beam generator for generating a plurality of excitation beams and a plurality of defocus-sensing beams.