IP Library Granted Patent US 10,262,844
Granted Patent B2
US 10,262,844 · App. 15/122,448 · Granted Apr 16, 2019

Oxide sintered body and method for manufacturing the same, sputtering target, and semiconductor device

Inventors: Miki Miyanaga (Itami, JP); Hideaki Awata (Itami, JP); Kenichi Watatani (Itami, JP)
Assignee: Sumitomo Electric Industries, Ltd.
H01J37/3429C04B35/01C04B35/6261C04B35/62645C23C14/3414C23C16/40H01J37/3491H01L29/22C04B2235/326C04B2235/3258C04B2235/3284C04B2235/3286C04B2235/5436C04B2235/5445C04B2235/602C04B2235/76C04B2235/767C04B2235/77C04B2235/80H01J2237/332
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Quick Facts
Patent No.
US 10,262,844
App. No.
15/122,448
Granted
Apr 16, 2019
Kind
B2
Abstract

There is provided an oxide sintered body including indium, tungsten and zinc, wherein the oxide sintered body includes a bixbite type crystal phase as a main component and has an apparent density of higher than 6.6 g/cm 3 and equal to or lower than 7.5 g/cm 3 , a content rate of tungsten to a total of indium, tungsten and zinc in the oxide sintered body is higher than 0.5 atomic % and equal to or lower than 5.0 atomic %, a content rate of zinc to the total of indium, tungsten and zinc in the oxide sintered body is equal to or higher than 1.2 atomic % and equal to or lower than 19 atomic %, and an atomic ratio of zinc to tungsten is higher than 1.0 and lower than 60. There are also provided a sputtering target including this oxide sintered body, and a semiconductor device.

Claims (6)

1. An oxide sintered body comprising indium, tungsten and zinc, wherein

the oxide sintered body includes a bixbite type crystal phase as a main component, and further includes a zinc tungstate compound crystal phase,

the oxide sintered body has an apparent density of higher than 6.6 g/cm3 and equal to or lower than 7.5 g/cm 3 ,

a content rate of tungsten to a total of indium, tungsten and zinc in the oxide sintered body is higher than 0.5 atomic % and equal to or lower than 5.0 atomic %,

a content rate of zinc to the total of indium, tungsten and zinc in the oxide sintered body is equal to or higher than 1.2 atomic % and equal to or lower than 19 atomic %, and an atomic ratio of zinc to tungsten is higher than 1.0 and lower than 60.

2. A sputtering target comprising the oxide sintered body as recited in claim 1 .

Assignments (3)
CHANGE OF NAME Recorded Mar 31, 2026
From: MITSUI MINING AND SMELTING COMPANY, LIMITED
To: MITSUI KINZOKU COMPANY, LIMITED
Reel/Frame 075357/0342 →
NUNC PRO TUNC ASSIGNMENT Recorded Dec 9, 2022
From: SUMITOMO ELECTRIC INDUSTRIES, LTD.
To: MITSUI MINING & SMELTING CO., LTD.
Reel/Frame 062105/0079 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2016
From: MIYANAGA, MIKI; AWATA, HIDEAKI; WATATANI, KENICHI
To: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Reel/Frame 039578/0875 →
Priority Claims (1)
JP 2015-026251 · Feb 13, 2015 · national
Continuity (1)
Related Publication 20170069474A1 · Mar 9, 2017