Polishing pad and process for producing same
Provided is a polishing pad which is capable of providing a high flatness to a polishing workpiece and suppressing the formation of scratches, and a method therefor. The polishing pad comprises a foamed urethane sheet on the surface which includes closed cells and open cells and which satisfies the following requirements: (1) an open cell ratio is 20-80 vol % where the total volume of closed cells and open cells is taken as 100 vol %, (2) the ratio [tan δ (wet/dry) ratio] of a loss factor tan δ in a water-absorption state to that in a dry state is 1.3-1.7, the loss factors being measured according to JIS K7244-4 with an initial load of 20 g at a measuring frequency of 1 Hz at a temperature of 26° C. in a tensile mode over a strain range from 0.01 to 0.1%, and (3) the Shore DO hardness according to ASTM D2240 is 60-80.
1. A polishing pad provided on a surface thereof with a foamed urethane sheet which includes closed cells and open cells, wherein
the foamed urethane sheet satisfies the following requirements (1) to (3):
(1) a ratio of the open cells relative to the total volume of the closed cells and the open cells included in the foamed urethane sheet is 40 to 75% by volume,
(2) a ratio [tan δ (wet/dry) ratio] of a loss factor tan δ in a water-absorption state to a loss factor tan δ in a dry state is 1.3 to 1.7, the loss factors being measured according to JIS K7244-4 with an initial load of 20 g at a measuring frequency of 1 Hz at a temperature of 26° C. in a tensile mode over a strain range from 0.01 to 0.1%, and
(3) a Shore DO hardness measured according to ASTM D2240 is 60 to 80.
2. The polishing pad according to claim 1 , wherein
the foamed urethane sheet includes the closed cells at a ratio of 15 to 35% by volume, the open cells at a ratio of 30 to 45% by volume, and a resin portion at a ratio of 35 to 45% by volume, provided that the total of the closed cells, the open cells, and the resin portion is taken as 100% by volume.
3. The polishing pad according to claim 1 , wherein
an average opening diameter on a surface of the foamed urethane sheet is 70 to 90 μm.
4. A method for producing a polishing pad according to claim 1 , the method comprising:
step (a) of pouring a curable composition comprising a urethane prepolymer into a mold; and
step (b) of foaming and curing the curable composition in the mold, wherein
in the step (b), the curable composition is foamed and cured without closing the mold with an upper lid, or
when the curable composition is foamed and cured with the mold being closed with an upper lid in the step (b), the curable composition is poured in the step (a) in such an amount that a foamed and cured product of the curable composition does not come into contact with the upper lid of the mold,
wherein the foamed urethane sheet satisfies the following requirements (1) to (3):
(1) a ratio of the open cells relative to the total volume of the closed cells and the open cells included in the foamed urethane sheet is 40 to 75% by volume,
(2) a ratio [tan δ (wet/dry) ratio] of a loss factor tan δ in a water-absorption state to a loss factor tan δ in a dry state is 1.3 to 1.7, the loss factors being measured according to JIS K7244-4 with an initial load of 20 g at a measuring frequency of 1 Hz at a temperature of 26° C. in a tensile mode over a strain range from 0.01 to 0.1%, and
(3) a Shore DO hardness measured according to ASTM D2240 is 60 to 80.
5. The production method according to claim 4 , wherein
the curable composition does not comprise a foam stabilizer.
6. The method according to claim 4 , wherein
the curable composition comprises no silicone-based surfactant.
7. The polishing pad according to claim 1 , wherein
the foamed urethane sheet comprises no silicone-based surfactant.
8. The polishing pad according to claim 1 , wherein
the foamed urethane sheet comprises no foam stabilizer.
9. The polishing pad according to claim 1 , wherein
the ratio [tan δ (wet/dry) ratio] is 1.4 to 1.7.
10. The polishing pad according to claim 1 , wherein
the ratio of the open cell relative to the total volume of the closed cells and the open cells included in the foamed urethane sheet is 50 to 70% by volume.
11. The polishing pad according to claim 1 , wherein
the ratio of the open cell relative to the total volume of the closed cells and the open cells included in the foamed urethane sheet is 50 to 70% by volume, and
the ratio [tan δ (wet/dry) ratio] is 1.4 to 1.7, and
the foamed urethane sheet comprises no foam stabilizer.