Microphone having increased rear volume, and method for production thereof
For a microphone having an increased rear volume, a cavity housing is proposed, comprising at least a base plate and a covering, which define and enclose the cavity. On the base plate, a microphone transducer, usually an MEMS component, is mounted alongside a sound guiding element. The microphone transducer and the sound guiding element are sealed off with respect to the base plate by a partition and separate the front volume from a rear volume under the covering. The sound guiding element provides a sound channel, which connects an opening in the covering to the front volume. The sound guiding element finishes right up against the covering and thus seals off the sound channel with respect to the rear volume.
1. A microphone
having a closed cavity housing, which has a base plate, a covering and an opening therein for the sound entry;
having a microphone transducer, formed as an MEMS component, and a sound guiding element with a sound channel formed therein, the two of which are arranged alongside one another on the base plate within the cavity housing, and
having a partition, which divides the inside of the cavity housing into a front volume and a rear volume,
in which the sound channel connects the opening to the front volume and is closed off in a soundproof manner with respect to the rear volume,
in which the partition is formed as a film, which extends over at least the microphone transducer and the sound guiding element and is sealed off with respect to the base plate,
in which a lead-through, which connects the rear volume within the cavity housing to a volume preformed in the MEMS microphone transducer above a diaphragm, is left free in the film above the microphone transducer, and
in which the sound guiding element with the sound channel finishes right up against the covering around the opening.
2. The microphone according to claim 1 ,
in which the sound guiding element has a greater height above the base plate than the microphone transducer, and thus after closing of the cavity housing can lie against the inner side of the covering while the upper side of the MEMS microphone transducer remains at a distance from the inner side of the covering.
3. The microphone according to claim 1 ,
in which the sound guiding element is mounted together with the microphone transducer on the base plate by the same technology and
in which the film serves for the sealing between the sound guiding element and the covering.
4. The microphone according to claim 1 ,
in which on the base plate there is also mounted an integrated circuit, which is arranged under the partition and therefore within the front volume, or in the rear volume.
5. The microphone according to claim 1 ,
in which the covering is formed as a cap, which is adhesively attached or soldered on the base plate and under which the cavity of the cavity housing is enclosed.
6. The microphone according to claim 5 ,
in which the cap consists of metal or at least comprises a metal layer.
7. The microphone according to claim 1 ,
in which the sound guiding element has at least an upwardly facing planar surface with a passage for the sound channel and a side part, with which it sits on the base plate.
8. The microphone according to claim 1 ,
in which the sound guiding element is produced from metal, ceramic or a printed circuit board material.
9. The microphone according to claim 4 ,
in which the base plate has connection areas for the microphone transducer and the integrated circuit, and
in which the connection areas are connected in an electrically conducting manner to external contacts on the underside of the base plate.
10. A method for producing a microphone having an increased rear volume,
in which a microphone transducer and a sound guiding element with a sound channel are mounted closely alongside one another on a base plate of a cavity housing,
in which the microphone transducer and the sound guiding element are covered over with a film, which is sealed off with respect to the base plate,
in which a lead-through through the film over the microphone transducer and a passage through the film at the upper mouth of the sound channel on the upper side of the sound guiding element are provided,
in which the cavity housing is closed by placing a covering onto the base plate,
wherein the sound guiding element supports the covering over the base plate,
wherein, after being placed on, an opening in the covering finishes with the upper mouth of the sound channel and the lower opening of the sound channel is connected to a front volume under the film,
wherein a diaphragm on the underside of the microphone transducer is coupled to the front volume,
wherein the front volume is separated by the film from the rear volume enclosed between the covering and the film.
11. The microphone according to claim 1 ,
in which the sound guiding element has a greater height above the base plate than the microphone transducer, and thus after closing of the cavity housing can lie against the inner side of the covering while the upper side of the MEMS microphone transducer remains at a distance from the inner side of the covering.
12. The microphone according to claim 1 ,
in which the sound guiding element is mounted together with the microphone transducer on the base plate by the same technology and
in which the film serves for the sealing between the sound guiding element and the covering.
13. The microphone according to claim 1 ,
in which on the base plate there is also mounted an integrated circuit, which is arranged under the partition and therefore within the front volume, or in the rear volume.
14. The microphone according to claim 2 ,
in which on the base plate there is also mounted an integrated circuit, which is arranged under the partition and therefore within the front volume, or in the rear volume.
15. The microphone according to claim 3 ,
in which on the base plate there is also mounted an integrated circuit, which is arranged under the partition and therefore within the front volume, or in the rear volume.
16. The microphone according to claim 1 ,
in which the covering is formed as a cap, which is adhesively attached or soldered on the base plate and under which the cavity of the cavity housing is enclosed.
17. The microphone according to claim 2 ,
in which the covering is formed as a cap, which is adhesively attached or soldered on the base plate and under which the cavity of the cavity housing is enclosed.
18. The microphone according to claim 5 ,
in which the base plate has connection areas for the microphone transducer and the integrated circuit, and
in which the connection areas are connected in an electrically conducting manner to external contacts on the underside of the base plate.
19. The microphone according to claim 7 ,
in which the base plate has connection areas for the microphone transducer and the integrated circuit, and
in which the connection areas are connected in an electrically conducting manner to external contacts on the underside of the base plate.
20. A microphone
having a closed cavity housing, which has a base plate, a covering and an opening therein for the sound entry,
having a microphone transducer, formed as an MEMS component, and a sound guiding element with a sound channel formed therein, the two of which are arranged alongside one another on the base plate within the cavity housing,
having a partition, which divides the inside of the cavity housing into a front volume and a rear volume,
in which the sound channel connects the opening to the front volume and is closed off in a soundproof manner with respect to the rear volume,
in which the covering is formed as a cap, which is adhesively attached or soldered on the base plate and under which the cavity of the cavity housing is enclosed,
in which the partition is formed as a film, which extends over at least the microphone transducer and the sound guiding element and is sealed off with respect to the base plate,
in which a lead-through, which connects the rear volume within the cavity housing to a volume preformed in the MEMS microphone transducer above a diaphragm, is left free in the film above the microphone transducer, and
in which the sound guiding element with the sound channel finishes right up against the covering around the opening.