IP Library › Granted Patent US 10,267,629
Granted Patent B2
US 10,267,629 · App. 15/127,425 · Granted Apr 23, 2019

Measurement probe unit for metrology applications

Inventors: Frank Thys (Willebroek, BE); Hans Thielemans (Rotselaar, BE); Raf Nysen (Veltem-Beisem, BE); Laurens Van Horenbeek (Haacht, BE)
Assignee: NIKON METROLOGY NV
G01B21/047G01B5/012G01B7/012G01B11/007G01R1/067
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Quick Facts
Patent No.
US 10,267,629
App. No.
15/127,425
Granted
Apr 23, 2019
Kind
B2
Abstract

The present invention provides a dimensional measurement probe unit ( 100 ) for attachment to a probe head ( 200 ) of a localizer ( 300 ), comprising: a measurement probe ( 150 ) for dimensional measurement of an object ( 400 ); a revolute joint ( 170 ) integrated into the measurement probe ( 150 ); and a probe unit interface ( 120 ) for repeated dismountable connection to a probe head ( 200 ) wherein the probe unit interface ( 120 ) is revolutely connected to the measurement probe ( 150 ) by the revolute joint ( 170 ).

Claims (38)

1. A dimensional measurement probe unit ( 100 ) for attachment to a probe head ( 200 ) of a localizer ( 300 ), comprising:

a measurement probe ( 150 ) for dimensional measurement of an object ( 400 );

a joint having only one degree of freedom of movement that is a revolute joint ( 170 ) non-dismountably integrated into the measurement probe ( 150 ); and

a probe unit interface ( 120 ) for repeated dismountable connection to a probe head ( 200 ) wherein the probe unit interface ( 120 ) is revolutely connected to the measurement probe ( 150 ) by the revolute joint ( 170 ).

2. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein:

the revolute joint ( 170 ) comprises a first body ( 172 ) and a second body ( 174 ) arranged as to be rotatable relative to the first body ( 172 ) around the revolute joint ( 170 ) axis of rotation ( 171 ),

the first body ( 172 ) is in fixed relation to the measurement probe ( 150 ), and the second body ( 174 ) is in fixed relation to the probe unit interface ( 120 ), and

the first body ( 172 ) is non-dismountably attached to the measurement probe ( 150 ),

wherein an axis of rotation of the second body ( 174 ) has a fixed, non-adjustable direction relative to the first body ( 172 ).

3. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein the revolute joint ( 170 ) is a revolute latching joint ( 170 ′) configured to latch at a plurality of different discrete revolute angles.

4. Dimensional measurement probe unit ( 100 ) according to claim 3 , where the revolute joint ( 170 ) is a revolute latching joint ( 170 ′) configured to latch at a plurality of different discrete revolute angles, and

the first body ( 172 ) is provided with a plurality of discrete first latching elements ( 176 ) arranged in a fictive circle, each latching element ( 176 ) representing a discrete revolute angle, and

the second body ( 174 ) is provided with at least one second latching element ( 178 ) configured to latch with any one of the plurality of discrete first latching elements ( 176 ) of the first body ( 172 ).

5. Dimensional measurement probe unit ( 100 ) according to claim 4 , where the number of second latching elements ( 178 ) is three, arranged in a fictive circle.

6. Dimensional measurement probe unit ( 100 ) according to claim 4 , wherein the first latching element ( 176 ) and the second latching element ( 178 ) form respective parts of a revolutely dismountable kinematic mount.

7. Dimensional measurement probe unit ( 100 ) according to claim 4 , wherein

the second latching element ( 178 ) comprises two spherical bodies for kinematic mounting with one cylindrical bar comprised in the first latching element ( 176 ), or

the second latching element ( 178 ) comprises one cylindrical bar, for kinematic mounting with two spherical bodies comprised in the first latching element ( 176 ).

8. Dimensional measurement probe unit ( 100 ) according to claim 4 , further comprising a spacing ring ( 130 ) to receive forces between the first body ( 172 ) and second body ( 174 ), comprising an annular ring body provided with at least one pair of diametrically opposed pivoting elements ( 144 , 144 ′) configured to provide pivoting of the first body ( 172 ) relative to the second body ( 174 ).

9. Dimensional measurement probe unit ( 100 ) according to claim 8 , wherein there are two pairs of pivoting elements, a first pair ( 142 ) disposed mutually diametrically opposed on a first side ( 132 ) of the spacing ring ( 130 ), and a second pair ( 144 , 144 ′) disposed mutually diametrically opposed on a second side ( 134 ) of the spacing ring ( 130 ), and wherein the first and second pairs of pivoting elements are mutually offset by 90 degrees with respect to the revolute joint ( 170 ) axis of rotation ( 171 ).

10. Dimensional measurement probe unit ( 100 ) according to claim 9 , wherein the spacing ring ( 130 ) is further provided with two pairs of pivot stop elements ( 138 , 138 ′, 140 , 140 ′) complementing the two pairs of pivoting elements, each pivot stop element ( 138 , 138 ′, 140 , 140 ′) disposed on the opposite side ( 132 , 134 ) of the spacing ring ( 130 ) to and at the same angular position as a corresponding pivoting element.

11. Dimensional measurement probe unit ( 100 ) according to claim 8 , wherein the spacing ring ( 130 ) is made at least partly from a compliant material, preferably from brass.

12. Dimensional measurement probe unit ( 100 ) according to claim 8 , further comprising a threaded rotatable collar ( 187 b ) configured to apply a tightening force between the first ( 172 ) and second ( 174 ) bodies to maintain them in mutual coupling contact, wherein the spacing ring ( 130 ) is disposed in coupling contact with the rotatable threaded collar ( 187 b ) so as to be reversibly compressed when the rotatable collar ( 187 b ) is tightened.

13. Dimensional measurement probe unit ( 100 ) according to claim 1 , further comprising an angular measurement assembly configured to measure an angle adopted by the revolute joint ( 170 ) and to provide a signal corresponding to the angular measurement.

14. Dimensional measurement probe unit ( 100 ) according to claim 13 , wherein the angular measurement assembly comprises an angular measurement member ( 188 ) comprising:

a shaft ( 193 ) oriented along the axis of rotation ( 171 ) and in fixed relation to the probe unit interface ( 120 ), and

a geometric structure ( 190 ) attached to the shaft ( 193 ), configured to occlude light, according to the angular position of the first body ( 172 ) relative to second body ( 174 ).

15. Dimensional measurement probe unit ( 100 ) according to a claim 14 , wherein the geometric structure ( 190 ) comprises at least one sloped surface.

16. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein the measurement probe ( 150 ) comprises an external housing ( 156 ), and the distance between the probe unit interface ( 120 ) and the external housing ( 156 ) is minimised to the extent that rotation of the measurement probe ( 150 ) around the revolute point ( 170 ) avoids collision with probe head ( 200 ) or localiser ( 300 ).

17. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein the measurement probe ( 150 ) is an optical probe.

18. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein the measurement probe ( 150 ) is configured to output signals corresponding to the dimensional measurement.

19. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein the number of revolute joints integrated into the probe is only one.

20. Dimensional measurement probe unit ( 100 ) according to claim 1 , wherein the revolute joint ( 170 ) is provided with a rotation limiter configured to limit the extent of rotation of the revolute joint ( 170 ).

21. Dimensional measurement probe unit ( 100 ) according to claim 20 , wherein the rotation limiter comprises a pair elements, one of the pair being a kidney slot ( 189 a ) disposed on the first ( 172 ) or second ( 174 ) body and the other element of the pair being a pin ( 189 b ) disposed on the other body configured to engage with the kidney slot ( 189 a ).

22. Dimensional measurement probe unit ( 100 ) according to claim 21 , wherein the kidney slot ( 189 a ) is disposed with a first depth ( 1800 ) that engages the pin ( 189 b ) to allow mutual rotation of the first ( 172 ) and second ( 174 ) bodies to the extent of limited rotation of the joint, and further contains a plurality of discrete notches ( 1802 , 1802 ′) that also engages the pin ( 189 b ) to repeatably lock the relative angular positions of the first ( 172 ) and second ( 174 ) bodies at a plurality of discreet angles which coincide with the discrete revolute angles of the latching joint ( 170 ′).

23. A method for adapting a measurement probe ( 150 ) for dimensional measurement of an object ( 400 ), to provide an addition degree of freedom of movement, comprising,

providing a joint having only one degree of freedom of movement that is a revolute joint ( 170 ) disposed with a probe unit interface ( 120 ) for repeated dismountable connection to a probe head ( 200 ); and

attaching the revolute joint to the measurement probe ( 150 ) such that the probe unit interface ( 120 ) is revolutely connected to the measurement probe ( 150 ) by the revolute joint ( 170 ), whereby the attachment is non-dismountable.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 27, 2025
From: NIKON METROLOGY NV
To: LK METROLOGY LTD.
Reel/Frame 070648/0750 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 17, 2017
From: THYS, FRANK; THIELEMANS, HANS; NYSEN, RAF; HORENBEEK, LAURENS VAN
To: NIKON METROLOGY NV
Reel/Frame 040987/0914 →
Priority Claims (1)
EP 14163889 · Apr 8, 2014 · regional
Continuity (1)
Related Publication 20180172442A1 · Jun 21, 2018
Cited By (2)
US 12,578,189 US 12,596,002