TUNABLE SENSING DEVICE

1 . A tunable sensing device, comprising:

a substrate;

a deformable dielectric unit that is disposed on said substrate, and that is formed with a receiving space; and

a tunable member that is received in said receiving space, and that has a stiffness tunable by an external electric field or an external magnetic field.

2 . The tunable sensing device as claimed in claim 1 , further comprising an electrode unit that includes a first electrode and a second electrode, which are disposed in said dielectric unit, and are respectively disposed at two opposite sides of said tunable member.

3 . The tunable sensing device as claimed in claim 2 , wherein said tunable member includes an insulating fluid and a plurality of particles dispersed in said insulating fluid.

4 . The tunable sensing device as claimed in claim 3 , wherein said particles of said tunable member are dielectric particles that are capable of aligning along the external electric field for increasing said stiffness of said tunable member.

5 . The tunable sensing device as claimed in claim 3 , wherein said particles of said tunable member are magnetic particles that are capable of aligning along the external magnetic field for increasing said stiffness of said tunable member.

6 . The tunable sensing device as claimed in claim 2 , wherein said tunable member is an electrorheological fluid.

7 . The tunable sensing device as claimed in claim 2 , wherein said tunable member is a magnetorheological fluid.

8 . The tunable sensing device as claimed in claim 2 , wherein said tunable member is an electroactive polymer.

9 . The tunable sensing device as claimed in claim 2 , wherein a maximum capacitance value measured between said first and second electrodes when said tunable member is applied with the external electric field or the external magnetic field is larger than a maximum capacitance value measured between said first and second electrodes when said tunable member is not applied with the external electric field or the external magnetic field.

10 . The tunable sensing device as claimed in claim 2 , wherein a maximum capacitance value measured between said first and second electrodes when said tunable member is applied with the external electric field or the external magnetic field is different from a maximum capacitance value measured between said first and second electrodes when said tunable member is not applied with the external electric field or the external magnetic field.

11 . The tunable sensing device as claimed in claim 2 , wherein:

said dielectric unit has a bottom portion disposed on said substrate, a side portion extending from a periphery of said bottom portion away from said substrate, and a top portion connected to said side portion and opposite to said bottom portion;

said bottom portion, said side portion and said top portion cooperatively define said receiving space; and

said first electrode is disposed in said top portion and said second electrode is disposed in said bottom portion.

12 . The tunable sensing device as claimed in claim 11 , wherein said dielectric unit further has at least one through hole penetrating through said top portion, and being in spatial communication with said receiving space, and said dielectric unit includes a covering layer disposed on said top portion and covering said at least one through hole.

13 . The tunable sensing device as claimed in claim 12 , wherein said top portion of said dielectric unit is formed with a recess in which said second electrode is disposed.

14 . The tunable sensing device as claimed in claim 12 , wherein said covering layer is made of a material selected from the group consisting of parylene C, parylene D, parylene N, silicon dioxide, silicon nitride, polyimide, metal, and combinations thereof.