Method of producing microfluidic device, microfluidic device, and photosensitive resin composition
The present disclosure relates to a method of producing a microfluidic device, a microfluidic device, and a photosensitive resin composition, the method including the steps of: forming a resin layer on a support from a photosensitive resin composition that includes a compound having at least two radical-polymerizable groups, a photoradical generator, a compound having at least two cationically reactive groups, a photocation generator, and at least one compound selected from a protective group-containing amine, a photodegradable base, an imide structure-containing compound, an amide structure-containing compound and an urea structure-containing compound; partially UV-exposing and developing the resin layer; preparing a laminate by placing a cover material on the thus developed resin layer; and UV-exposing the thus obtained laminate.
1. A method of producing a microfluidic device, said method comprising:
a step (1) of forming a resin layer on a support from a photosensitive resin composition that comprises a compound having at least two radical-polymerizable groups, a photoradical generator, a compound having at least two cationically reactive groups, a photocation generator, and a protective group-containing amine, wherein the protective group-containing amine is an N-t-butoxycarbonyl group-containing amine compound;
a step (2) of UV-exposing parts of said resin layer and developing said resin layer;
a step (3) of preparing a laminate by placing a cover material on the thus developed resin layer; and
a step (4) of UV-exposing the thus obtained laminate.
2. The method according to claim 1 , wherein said photosensitive resin composition further comprises an alkali-soluble resin.
3. The method according to claim 1 , wherein a dose of UV-exposure in said step (2) is less than a dose of UV-exposure in said step (4).
4. The method according to claim 1 , wherein a light source of said UV-exposure in said step (2) is the same as a light source of said UV-exposure in said step (4).
5. The method according to claim 1 , wherein the compound having at least two cationically reactive groups is selected from the group consisting of an active methylene-containing compound, an oxazoline compound, a cyclic ether compound, an isocyanate group-containing compound, an aldehyde group-containing phenol compound, a vinyl ether compound and a dipropenyl ether compound.
6. The method according to claim 1 , wherein the developing in step (2) comprises removing an unexposed portion of the resin layer.
7. A microfluidic device comprising a flow channel inside a member, said microfluidic device comprising:
a flow channel wall formed on a support using a photosensitive resin composition that comprises a compound having at least two radical-polymerizable groups, a photoradical generator, a compound having at least two cationically reactive groups, a photocation generator, and a protective group-containing amine, wherein the protective group-containing amine is an N-t-butoxycarbonyl group-containing amine compound; and
a cover material that covers a groove formed by said support and said flow channel wall.
8. The microfluidic device according to claim 7 , wherein the compound having at least two cationically reactive groups is selected from the group consisting of an active methylene-containing compound, an oxazoline compound, a cyclic ether compound, an isocyanate group-containing compound, an aldehyde group-containing phenol compound, a vinyl ether compound and a dipropenyl ether compound.
9. A photosensitive resin composition comprising: a compound having at least two radical-polymerizable groups; a photoradical generator; a compound having at least two cationically reactive groups; a photocation generator; and a protective group-containing amine, wherein the protective group-containing amine is an N-t-butoxycarbonyl group-containing amine compound.
10. The photosensitive resin composition according to claim 9 , wherein the compound having at least two cationically reactive groups is selected from the group consisting of an active methylene-containing compound, an oxazoline compound, a cyclic ether compound, an isocyanate group-containing compound, an aldehyde group-containing phenol compound, a vinyl ether compound and a dipropenyl ether compound.